"A novel method of determination of electron temperature and electron density in plasma based on optical emission spectroscopy and collisional-radiative modelling was compared with Langmuir probe measurement and PIC/MC simulation. An RF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pa was investigated by intensity-calibrated optical emission spectroscopy. The intensities of neon transitions between 3s-3p states were fitted with CR model to determine the electron temperature and density. Metastable density measured in absorption was used in the calculations. A good agreement between electron temperature measured by OES+CR method and PIC/MC simulation was obtained close to driven electrode. The decrease of the electron temperature going into the bulk plasma, as expected from PIC/MC simulation, was not observed in experiment. Electron density determined from the fit of absolute intensities was found to be 5$\\times$ larger than the result of Langmuir probe measurement." . "Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling"@en . . "3"^^ . . . "Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling"@en . . . . "A novel method of determination of electron temperature and electron density in plasma based on optical emission spectroscopy and collisional-radiative modelling was compared with Langmuir probe measurement and PIC/MC simulation. An RF(13.56 MHz) capacitively-coupled discharge in neon at 10 Pa was investigated by intensity-calibrated optical emission spectroscopy. The intensities of neon transitions between 3s-3p states were fitted with CR model to determine the electron temperature and density. Metastable density measured in absorption was used in the calculations. A good agreement between electron temperature measured by OES+CR method and PIC/MC simulation was obtained close to driven electrode. The decrease of the electron temperature going into the bulk plasma, as expected from PIC/MC simulation, was not observed in experiment. Electron density determined from the fit of absolute intensities was found to be 5$\\times$ larger than the result of Langmuir probe measurement."@en . . . . "251338" . "Trunec, David" . . "Navr\u00E1til, Zden\u011Bk" . "[615CC6EE6105]" . . "Brzobohat\u00FD, Oto" . . . "14310" . "RIV/00216224:14310/10:00040642!RIV11-GA0-14310___" . "Dvo\u0159\u00E1k, Pavel" . . . . "RIV/00216224:14310/10:00040642" . . . . . "Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling" . . . "P(GA202/09/0800), P(KAN101630651), S, Z(MSM0021622411)" . "optical emission spectroscopy; collisional-radiative model; RF discharge; neon"@en . "Comparative Study of RF Discharge in Neon by OES, Langmuir Probe, CR and PIC/MC Modelling" . "4"^^ .