"Hani\u010Dinec, Martin" . "S\u0165ahel, Pavel" . "Plasma treatment of silicon surface"@en . . . "Sk\u00E1celov\u00E1, Dana" . "The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surface free energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated."@en . . "2010-05-26+02:00"^^ . "RIV/00216224:14310/10:00040567" . . "Plze\u0148" . "Plasma treatment of silicon surface" . "14310" . "The contribution focuses on the plasma treatment of crystalline silicon surface. The plasma was generated by Diffuse Coplanar Surface Barrier Discharge (DCSBD) at atmospheric pressure in an ambient air. By means of the contact angle measurements surface free energy was studied an by atomic force microscope (AFM) the surface roughness of silicon before and after plasma treatment was investigated." . . "Plze\u0148" . "279130" . "Potential and Applications of Thin Ceramic and Metal Coatings" . . . . . "2"^^ . "Plasma treatment of silicon surface"@en . "4"^^ . . "Z\u00E1pado\u010Desk\u00E1 univerzita v Plzni" . "4"^^ . . . . . "RIV/00216224:14310/10:00040567!RIV11-MSM-14310___" . . "O, P(KAN101630651), Z(MSM0021622411)" . . "silicon surface - dielectric barrier discharge - plasma treatment"@en . "\u010Cern\u00E1k, Mirko" . "[9B6BCA8C5320]" . . "Plasma treatment of silicon surface" . . . "978-80-7043-894-7" . .