. "Changes of UV Optical Properties of Plasma Damaged Low-k Dielectrics for Sidewall Damage Scatterometry" . "0"^^ . "5dzxkCTG5ZHAywGosHkVEyxRX+Y=" . . . . "1"^^ . "0"^^ . . . . . . . "RIV/00216224:14310/08:00027726!RIV10-MSM-14310___" . "\u010Cl\u00E1nek ve sborn\u00EDku m\u00E1 uvedeno ISBN nebo ISSN, ale to nen\u00ED v datab\u00E1zi Conference Proceedings Citation Index spole\u010Dnosti Thomson Reuters." . . "http://www.isvav.cz/h11/resultDetail.do?rowId=RIV%2F00216224%3A14310%2F08%3A00027726!RIV10-MSM-14310___"^^ . "Materials Research Society Symposium Proceedings" .