"RIV/00216224:14310/08:00025835!RIV11-MSM-14310___" . . "000255702600018" . . "DE - Spolkov\u00E1 republika N\u011Bmecko" . "We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate." . "in situ ellipsometry; monitoring; closed loop control"@en . "Huml\u00ED\u010Dek, Josef" . "372603" . "1"^^ . . . . "In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures"@en . "1"^^ . . "205" . "4"^^ . "In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures" . . . . "physica status solidi (a), Applied research" . . "Z(MSM0021622410)" . "In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures" . "14310" . . "RIV/00216224:14310/08:00025835" . . "4" . . "[FDB9DA73187E]" . . "1862-6300" . . "In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures"@en . "We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in-situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond-like carbon on TiCN/steel substrate."@en .