. "A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra." . . "Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model"@en . "[D8EDD4ACFCE6]" . . "P(GA202/06/0776), Z(MSM0021622411)" . "Jurmanov\u00E1, Jana" . . . . "14310" . "Praha" . . "2008-06-16+02:00"^^ . "373213" . "Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008" . . "Praha" . . "Trunec, David" . "Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model"@en . . . . "Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model" . . "4"^^ . "\u010CVUT v Praze, Organiza\u010Dn\u00ED v\u00FDbor sympozia" . . . "4"^^ . . "RIV/00216224:14310/08:00025162" . . "1"^^ . "A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra."@en . . . "RIV/00216224:14310/08:00025162!RIV10-MSM-14310___" . "rf discharge; collisional-radiative model; optical emission spectroscopy; neon"@en . "Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model" . . "978-80-01-04030-0" . . "Dvo\u0159\u00E1k, Pavel" . "Navr\u00E1til, Zden\u011Bk" . .