. "[845C0C1FCED3]" . "14310" . "Nanocrystalline diamond films deposition by PECVD in ASTEX type microwave reactor"@en . "Nanokrystalick\u00E9 diamantov\u00E9 (NCD) vrstvy byly p\u0159ipraveny depozic\u00ED z plynn\u00E9 f\u00E1ze (CVD) za n\u00EDzk\u00E9ho tlaku v mikrovlnn\u00E9m plazmatu generovan\u00E9m v reaktou typu ASTEX. Vrstvy byly p\u0159ipraveny na k\u0159em\u00EDkov\u00FDch substr\u00E1tech s orientac\u00ED (111) ze sm\u011Bsi metanu (9 %) a vod\u00EDku p\u0159i teplot\u011B substr\u00E1tu 1090 K. Dod\u00E1van\u00FD mikrovlnn\u00FD v\u00FDkon (2,45 GHz) byl 850 W a pracovn\u00ED tlak \u010Dinil 7,5 kPa. Pro \u00FA\u010Del nukleace byl substr\u00E1t vystaven vysokofrekven\u010Dn\u00EDmu v\u00FDboji, kter\u00FD vytv\u00E1\u0159el samop\u0159edp\u011Bt\u00ED -125 V. P\u0159ipraven\u00E9 vrstvy vykazovaly velmi malou drsnost (kvadratick\u00E1 odchylka v\u00FD\u0161ek 9,1 nm) a tvrdost a elastick\u00FD modul dosahovaly hodnot 70 a 375 GPa. Optick\u00E9 konstanty byly ur\u010Deny pomoc\u00ED elipsometrie a m\u011B\u0159en\u00ED reflexe a vyhodnoceny na z\u00E1klad\u011B Rayleigh-Riceovi teorie a disperzn\u00EDho modelu zalo\u017Een\u00E9ho na parametrizaci hustoty stav\u016F. Depozi\u010Dn\u00ED rychlost byla 57 nm/min a to v\u010Detn\u011B 5 minutov\u00E9 nuklea\u010Dn\u00ED f\u00E1ze."@cs . "Rek, Anton\u00EDn" . . . . "Ja\u0161ek, Ond\u0159ej" . . . "Depozice nanokrystalick\u00FDch diamantov\u00FDch vrstev metodou PECVD v mikrovlnn\u00E9m reaktoru typu ASTEX" . . . "10"^^ . "Klapetek, Petr" . . "nanocrystalline diamond; PECVD; microwave discharge"@en . "P(GA106/05/0274), P(GA202/05/0607), Z(AV0Z20410507), Z(AV0Z20650511), Z(MSM0021622411), Z(MSM4977751303)" . . . "Mat\u011Bjkov\u00E1, Ji\u0159ina" . "Brno" . . "6"^^ . . "RIV/00216224:14310/06:00016135!RIV10-MSM-14310___" . "2006-01-01+01:00"^^ . . . "Nanocrystalline diamond film was deposited by microwave CVD in the ASTeX type reactor on a mirror polished (111) oriented n-doped silicon substrate. The deposition mixture consisted of 9 % of methane in hydrogen. The applied microwave power (2.45 GHz)and pressure were 850 W and 7.5 kPa, respectively. The substrate temperature was 1 090 K. The diamond nucleation process was enhanced by rf induced dc self{bias of i125 V. The film exhibited very low roughness (rms of heights 9.1 nm). Its hardness and elastic modules were 70 and 375 GPa, respectively. The optical constants were determined by combination of spectroscopic ellipsometry and reflectometry employing the Rayleigh-Rice theory for the roughness and the dispersion model of optical constants based on the parameterization of densities of states. The deposition rate was 57 nm/min including the 5 min nucleation step."@en . . "6"^^ . "Nanocrystalline diamond films deposition by PECVD in ASTEX type microwave reactor"@en . . "Bur\u0161\u00EDkov\u00E1, Vilma" . . "Depozice nanokrystalick\u00FDch diamantov\u00FDch vrstev metodou PECVD v mikrovlnn\u00E9m reaktoru typu ASTEX" . "Hustope\u010De" . "Depozice nanokrystalick\u00FDch diamantov\u00FDch vrstev metodou PECVD v mikrovlnn\u00E9m reaktoru typu ASTEX"@cs . "Franta, Daniel" . "Zaj\u00ED\u010Dkov\u00E1, Lenka" . . . "80-210-4195-1" . "RIV/00216224:14310/06:00016135" . . . "Kar\u00E1skov\u00E1, Monika" . . "Modern\u00ED trendy ve fyzice plazmatu a pevn\u00FDch l\u00E1tek II" . . "470819" . "Masarykova univerzita" . "Frgala, Zden\u011Bk" . . "Depozice nanokrystalick\u00FDch diamantov\u00FDch vrstev metodou PECVD v mikrovlnn\u00E9m reaktoru typu ASTEX"@cs . "Nanokrystalick\u00E9 diamantov\u00E9 (NCD) vrstvy byly p\u0159ipraveny depozic\u00ED z plynn\u00E9 f\u00E1ze (CVD) za n\u00EDzk\u00E9ho tlaku v mikrovlnn\u00E9m plazmatu generovan\u00E9m v reaktou typu ASTEX. Vrstvy byly p\u0159ipraveny na k\u0159em\u00EDkov\u00FDch substr\u00E1tech s orientac\u00ED (111) ze sm\u011Bsi metanu (9 %) a vod\u00EDku p\u0159i teplot\u011B substr\u00E1tu 1090 K. Dod\u00E1van\u00FD mikrovlnn\u00FD v\u00FDkon (2,45 GHz) byl 850 W a pracovn\u00ED tlak \u010Dinil 7,5 kPa. Pro \u00FA\u010Del nukleace byl substr\u00E1t vystaven vysokofrekven\u010Dn\u00EDmu v\u00FDboji, kter\u00FD vytv\u00E1\u0159el samop\u0159edp\u011Bt\u00ED -125 V. P\u0159ipraven\u00E9 vrstvy vykazovaly velmi malou drsnost (kvadratick\u00E1 odchylka v\u00FD\u0161ek 9,1 nm) a tvrdost a elastick\u00FD modul dosahovaly hodnot 70 a 375 GPa. Optick\u00E9 konstanty byly ur\u010Deny pomoc\u00ED elipsometrie a m\u011B\u0159en\u00ED reflexe a vyhodnoceny na z\u00E1klad\u011B Rayleigh-Riceovi teorie a disperzn\u00EDho modelu zalo\u017Een\u00E9ho na parametrizaci hustoty stav\u016F. Depozi\u010Dn\u00ED rychlost byla 57 nm/min a to v\u010Detn\u011B 5 minutov\u00E9 nuklea\u010Dn\u00ED f\u00E1ze." . . . "Bur\u0161\u00EDk, Ji\u0159\u00ED" .