"In this contribution a review of statistical quantities characterizing randomly rough surfaces that are important from the point of view of practice is presented. Furthermore, methods of measuring these quantities by means of atomic force microscopy and optical method based on combination of spectroscopic ellipsometry and spectroscopic reflectometry are described. These methods are illustrated through the results achieved for randomly rough surfaces of silicon single crystal and rough upper boundaries of thin films of TiO2. The results obtained for both the rough surfaces using the combined optical method and atomic force microscopy are mutually compared. A discussion of errors influencing the values of the statistical quantities determined by atomic force microscopy is also carried out. In this contribution we will moreover show that by means of both the mentioned experimental techniques one can even perform a quantitative analysis of the randomly rough surfaces exhibiting nanometric character, i.e."@en . . . "14310" . "3"^^ . "Drsnost; AFM; Elipsometrie; Odrazivost"@en . . "3"^^ . . "RIV/00216224:14310/05:00013550!RIV10-MPO-14310___" . "Franta, Daniel" . . . . . "Measurement of nanoroughness using optical methods and atomic force microscopy"@en . "80-214-3033-8" . . "Subkomise metrologie p\u0159i TNK 7" . "V tomto p\u0159\u00EDsp\u011Bvku je pod\u00E1n p\u0159ehled statistick\u00FDch veli\u010Din charakterizuj\u00EDc\u00EDch n\u00E1hodn\u011B drsn\u00E9 povrchy, kter\u00E9 jsou v\u00FDznamn\u00E9 z hlediska praxe. D\u00E1le jsou pops\u00E1ny zp\u016Fsoby m\u011B\u0159en\u00ED t\u011Bchto veli\u010Din pomoc\u00ED mikroskopie atomov\u00E9 s\u00EDly a optick\u00E9 metody zalo\u017Een\u00E9 na kombinaci spektroskopick\u00E9 elipsometrie a spektroskopick\u00E9 reflektometrie. Tyto zp\u016Fsoby jsou ilustrov\u00E1ny prost\u0159ednictv\u00EDm v\u00FDsledk\u016F dosa\u017Een\u00FDch u n\u00E1hodn\u011B drsn\u00FDch povrch\u016F monokrystalu k\u0159em\u00EDku a u drsn\u00FDch horn\u00EDch rozhran\u00EDch tenk\u00FDch vrstev TiO2. Obdr\u017Een\u00E9 v\u00FDsledky u obou druh\u016F n\u00E1hodn\u011B drsn\u00FDch povrch\u016F pomoc\u00ED kombinovan\u00E9 optick\u00E9 metody a mikroskopie atomov\u00E9 s\u00EDly jsou vz\u00E1jemn\u011B srovn\u00E1ny. Je tak\u00E9 provedena diskuse chyb, kter\u00E9 mohou ovlivnit hodnoty statistick\u00FDch veli\u010Din ur\u010Den\u00FDch pomoc\u00ED mikroskopie atomov\u00E9 s\u00EDly. V tomto p\u0159\u00EDsp\u011Bvku nav\u00EDc uk\u00E1\u017Eeme, \u017Ee pomoc\u00ED obou v\u00FD\u0161e zm\u00EDn\u011Bn\u00FDch experiment\u00E1ln\u00EDch technik je mo\u017En\u00E9 prov\u00E9st i kvantitativn\u00ED charakterizaci n\u00E1hodn\u011B drsn\u00FDch povrch\u016F vykazuj\u00EDc\u00EDch nanometrick\u00FD charakter, tj."@cs . "M\u011B\u0159en\u00ED nanodrsnosti pomoc\u00ED optick\u00FDch metod a mikroskopie atomov\u00E9 s\u00EDly"@cs . "M\u011B\u0159en\u00ED nanodrsnosti pomoc\u00ED optick\u00FDch metod a mikroskopie atomov\u00E9 s\u00EDly" . . . . "M\u011B\u0159en\u00ED nanodrsnosti pomoc\u00ED optick\u00FDch metod a mikroskopie atomov\u00E9 s\u00EDly" . . "Kvalita a GPS 2005" . "529500" . . "Ohl\u00EDdal, Ivan" . "RIV/00216224:14310/05:00013550" . "Brno" . "Klapetek, Petr" . . . "9"^^ . "V tomto p\u0159\u00EDsp\u011Bvku je pod\u00E1n p\u0159ehled statistick\u00FDch veli\u010Din charakterizuj\u00EDc\u00EDch n\u00E1hodn\u011B drsn\u00E9 povrchy, kter\u00E9 jsou v\u00FDznamn\u00E9 z hlediska praxe. D\u00E1le jsou pops\u00E1ny zp\u016Fsoby m\u011B\u0159en\u00ED t\u011Bchto veli\u010Din pomoc\u00ED mikroskopie atomov\u00E9 s\u00EDly a optick\u00E9 metody zalo\u017Een\u00E9 na kombinaci spektroskopick\u00E9 elipsometrie a spektroskopick\u00E9 reflektometrie. Tyto zp\u016Fsoby jsou ilustrov\u00E1ny prost\u0159ednictv\u00EDm v\u00FDsledk\u016F dosa\u017Een\u00FDch u n\u00E1hodn\u011B drsn\u00FDch povrch\u016F monokrystalu k\u0159em\u00EDku a u drsn\u00FDch horn\u00EDch rozhran\u00EDch tenk\u00FDch vrstev TiO2. Obdr\u017Een\u00E9 v\u00FDsledky u obou druh\u016F n\u00E1hodn\u011B drsn\u00FDch povrch\u016F pomoc\u00ED kombinovan\u00E9 optick\u00E9 metody a mikroskopie atomov\u00E9 s\u00EDly jsou vz\u00E1jemn\u011B srovn\u00E1ny. Je tak\u00E9 provedena diskuse chyb, kter\u00E9 mohou ovlivnit hodnoty statistick\u00FDch veli\u010Din ur\u010Den\u00FDch pomoc\u00ED mikroskopie atomov\u00E9 s\u00EDly. V tomto p\u0159\u00EDsp\u011Bvku nav\u00EDc uk\u00E1\u017Eeme, \u017Ee pomoc\u00ED obou v\u00FD\u0161e zm\u00EDn\u011Bn\u00FDch experiment\u00E1ln\u00EDch technik je mo\u017En\u00E9 prov\u00E9st i kvantitativn\u00ED charakterizaci n\u00E1hodn\u011B drsn\u00FDch povrch\u016F vykazuj\u00EDc\u00EDch nanometrick\u00FD charakter, tj." . . "[2726FC5B2A84]" . "Measurement of nanoroughness using optical methods and atomic force microscopy"@en . "Brno, Czech Republic" . . "2005-09-20+02:00"^^ . "M\u011B\u0159en\u00ED nanodrsnosti pomoc\u00ED optick\u00FDch metod a mikroskopie atomov\u00E9 s\u00EDly"@cs . . "P(FT-TA/094)" .