"Me\u0161ko, Marcel" . "A high-power pulsed-magnetron discharge (several kW/cm2)is described. It operates at pulse duration of the order of few \u013Es, signicantly shorter than in usual similar devices. The breakdown delay was reduced by using a low-current DC preionization. The study was performed for Cu target in Ar and He bufer gases by optical emission spectroscopy and electrical measurements. Saturation magnetron current is reached in a few \u013Es which permits to shorten the pulse duration avoiding arc formation. Unusual high current density up to 10A/cm2 induces very fast transition toward the stable self-sputtering regime. High plasma density favours high ion ux to the substrate. Preliminary result on Cu deposit in trenches is reported."@en . . "Va\u0161ina, Petr" . . . "A high-power pulsed-magnetron discharge (several kW/cm2)is described. It operates at pulse duration of the order of few \u013Es, signicantly shorter than in usual similar devices. The breakdown delay was reduced by using a low-current DC preionization. The study was performed for Cu target in Ar and He bufer gases by optical emission spectroscopy and electrical measurements. Saturation magnetron current is reached in a few \u013Es which permits to shorten the pulse duration avoiding arc formation. Unusual high current density up to 10A/cm2 induces very fast transition toward the stable self-sputtering regime. High plasma density favours high ion ux to the substrate. Preliminary result on Cu deposit in trenches is reported." . "FR - Francouzsk\u00E1 republika" . "0295-5075" . . "[D5F7612FB381]" . "Europhysics Letters" . "Boisse-Laporte, Caroline" . "Reduction of transient regime in fast preionized high power pulsed magnetron discharge" . "Bretagne, Jean" . "5"^^ . "540405" . . "3" . . "Reduction of transient regime in fast preionized high power pulsed magnetron discharge"@en . . "RIV/00216224:14310/05:00012968" . . "Reduction of transient regime in fast preionized high power pulsed magnetron discharge" . . . . . . . "14310" . "2"^^ . "Ganciu, Mihai" . "de Poucques, Ludovic" . "72" . . . . "RIV/00216224:14310/05:00012968!RIV10-MSM-14310___" . "pulsed magnetron; sputtering; preionization"@en . "Touzeau, Michel" . "7"^^ . "P(GD202/03/H162), Z(MSM0021622411)" . . "Reduction of transient regime in fast preionized high power pulsed magnetron discharge"@en .