"de Poucques, Ludovic" . "Touzeau, Michel" . "7"^^ . . . "Surface and Coating Technology" . . "Boisse-Laporte, Caroline" . "3"^^ . . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "Teul\u00E9-Gay, Lionel" . "14310" . . "1"^^ . . "800-803" . "RIV/00216224:14310/05:00012904!RIV08-MSM-14310___" . . . . "Va\u0161ina, Petr" . "Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge"@en . "P(GD202/03/H162), Z(MSM0021622411)" . "Comparison of two sources of ionisation in an IPVD reactor, microwave and RF discharge."@en . "515924" . "Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge"@en . "Bretagne, Jean" . "Srovn\u00E1n\u00ED dvou zdroj\u016F ionisace pri magnetronov\u00E9m napra\u0161ov\u00E1ni, dodate\u010Dn\u00E9ho mikrovlnn\u00E9ho a RF v\u00FDboje."@cs . "Comparison of two sources of ionisation in an IPVD reactor, microwave and RF discharge." . . . "Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge" . . "[0596011C8569]" . "RIV/00216224:14310/05:00012904" . . "0257-8972" . . "Comparison of the ionisation efficiency in a microwave and a radio-frequency assisted magnetron discharge" . "IPVD; sputtering; magnetron discharge; microwave discharge; RF discharge; absorption spectroscopy"@en . "200" . . . "Imbert, Jean-Christophe" . . "1-4" . "Srovn\u00E1n\u00ED ioniza\u010Dn\u00ED \u00FA\u010Dinnosti mikrovlnn\u00E9ho a radio-frekven\u010Dn\u00EDho v\u00FDboje doprov\u00E1zej\u00EDc\u00EDho magnetronov\u00FD v\u00FDboje"@cs . . "Srovn\u00E1n\u00ED ioniza\u010Dn\u00ED \u00FA\u010Dinnosti mikrovlnn\u00E9ho a radio-frekven\u010Dn\u00EDho v\u00FDboje doprov\u00E1zej\u00EDc\u00EDho magnetronov\u00FD v\u00FDboje"@cs . . .