"Measurement of mechanical stress in thin films using combined optical method"@en . . . "V tomto \u010Dl\u00E1nku je pops\u00E1na optick\u00E1 metoda umo\u017E\u0148uj\u00EDc\u00ED m\u011B\u0159en\u00ED mechanick\u00E9ho nap\u011Bt\u00ED v tenk\u00FDch vrstv\u00E1ch. Tato metoda je zalo\u017Eena na ur\u010Dov\u00E1n\u00ED polom\u011Br\u016F zak\u0159iven\u00ED deformovan\u00FDch podlo\u017Eek, kter\u00E1 vznikaj\u00ED v d\u016Fsledku existence nap\u011Bt\u00ED ve vrstv\u00E1ch vytvo\u0159en\u00FDch na t\u011Bchto podlo\u017Ek\u00E1ch. Hodnoty nap\u011Bt\u00ED jsou po\u010D\u00EDt\u00E1ny pomoc\u00ED modifikovan\u00E9 Stoneyovy rovnice. Hodnoty tlou\u0161t\u011Bk tenk\u00FDch vrstev, kter\u00E9 jsou rovn\u011B\u017E pot\u0159ebn\u00E9 pro v\u00FDpo\u010Det t\u011Bchto nap\u011Bt\u00ED, jsou ur\u010Deny pomoc\u00ED metody zalo\u017Een\u00E9 na interpretaci experiment\u00E1ln\u00EDch dat z\u00EDskan\u00FDch v r\u00E1mci v\u00EDce\u00FAhlov\u00E9 spektroskopick\u00E9 elipsometrie a spektroskopick\u00E9 reflektometrie. Tato kombinovan\u00E1 optick\u00E1 metoda je vyu\u017Eita pro ur\u010Den\u00ED hodnot mechanick\u00FDch nap\u011Bt\u00ED ve vrstv\u00E1ch DLC (diamond-like carbon) vytvo\u0159en\u00FDch na podlo\u017Ek\u00E1ch z monokrystalu k\u0159em\u00EDku, kter\u00E9 obsahuj\u00ED p\u0159\u00EDm\u011Bsy Si a O. V pr\u00E1ci je tak\u00E9 studov\u00E1na z\u00E1vislost hodnot nap\u011Bt\u00ED v t\u011Bchto vrstv\u00E1ch na hodnot\u00E1ch pom\u011Bru pr\u016Ftok\u016F hexamethyldisiloxanu (HMDSO) a metanu."@cs . "4"^^ . . "M\u011B\u0159en\u00ED mechanick\u00E9ho nap\u011Bt\u00ED v tenk\u00FDch vrstv\u00E1ch pomoc\u00ED kombinovan\u00E9 optick\u00E9 metody" . "P(GA101/04/2131), Z(MSM0021622411)" . "6"^^ . . "\u0160iler, Martin" . . . "6"^^ . "M\u011B\u0159en\u00ED mechanick\u00E9ho nap\u011Bt\u00ED v tenk\u00FDch vrstv\u00E1ch pomoc\u00ED kombinovan\u00E9 optick\u00E9 metody"@cs . . . "[6E06D9B539D1]" . "0447-6441" . . "\u010Cudek, Vlastimil" . "M\u011B\u0159en\u00ED mechanick\u00E9ho nap\u011Bt\u00ED v tenk\u00FDch vrstv\u00E1ch pomoc\u00ED kombinovan\u00E9 optick\u00E9 metody"@cs . . "V tomto \u010Dl\u00E1nku je pops\u00E1na optick\u00E1 metoda umo\u017E\u0148uj\u00EDc\u00ED m\u011B\u0159en\u00ED mechanick\u00E9ho nap\u011Bt\u00ED v tenk\u00FDch vrstv\u00E1ch. Tato metoda je zalo\u017Eena na ur\u010Dov\u00E1n\u00ED polom\u011Br\u016F zak\u0159iven\u00ED deformovan\u00FDch podlo\u017Eek, kter\u00E1 vznikaj\u00ED v d\u016Fsledku existence nap\u011Bt\u00ED ve vrstv\u00E1ch vytvo\u0159en\u00FDch na t\u011Bchto podlo\u017Ek\u00E1ch. Hodnoty nap\u011Bt\u00ED jsou po\u010D\u00EDt\u00E1ny pomoc\u00ED modifikovan\u00E9 Stoneyovy rovnice. Hodnoty tlou\u0161t\u011Bk tenk\u00FDch vrstev, kter\u00E9 jsou rovn\u011B\u017E pot\u0159ebn\u00E9 pro v\u00FDpo\u010Det t\u011Bchto nap\u011Bt\u00ED, jsou ur\u010Deny pomoc\u00ED metody zalo\u017Een\u00E9 na interpretaci experiment\u00E1ln\u00EDch dat z\u00EDskan\u00FDch v r\u00E1mci v\u00EDce\u00FAhlov\u00E9 spektroskopick\u00E9 elipsometrie a spektroskopick\u00E9 reflektometrie. Tato kombinovan\u00E1 optick\u00E1 metoda je vyu\u017Eita pro ur\u010Den\u00ED hodnot mechanick\u00FDch nap\u011Bt\u00ED ve vrstv\u00E1ch DLC (diamond-like carbon) vytvo\u0159en\u00FDch na podlo\u017Ek\u00E1ch z monokrystalu k\u0159em\u00EDku, kter\u00E9 obsahuj\u00ED p\u0159\u00EDm\u011Bsy Si a O. V pr\u00E1ci je tak\u00E9 studov\u00E1na z\u00E1vislost hodnot nap\u011Bt\u00ED v t\u011Bchto vrstv\u00E1ch na hodnot\u00E1ch pom\u011Bru pr\u016Ftok\u016F hexamethyldisiloxanu (HMDSO) a metanu." . . "14310" . "RIV/00216224:14310/05:00012755!RIV10-MSM-14310___" . "50" . . "In this paper an optical method enabling us to measure the mechanical stress in thin films is decribed. This method is based on determination of the curvature radii of the substrates curved originating in consequence of the existence of the stresses inside the films created onto these substrates. The stess values are calculated using the modified Stoney formula. The thin film thicknesses needed for calculating the stresses are determined by means of the method based on interpretation of the experimental data obtained using multiple angle spectroscopic ellipsometry and spectroscopic reflectometry. This combined optical method is utilized for determination of the mechanical stresses in the DLC (diamond-like carbon) films prepared onto the substrates consisting of silicon single crystal containing impurities Si and O. In the paper the dependence of the stress inside these films on the values of ratio of the flow rates of hexamethyldisoloxane (HMDSO) and methane."@en . "Franta, Daniel" . . . . "Jemn\u00E1 mechanika a optika" . . "CZ - \u010Cesk\u00E1 republika" . "RIV/00216224:14310/05:00012755" . "Bur\u0161\u00EDkov\u00E1, Vilma" . . . . "DLC thin films; mechanical stress; double-beam interferometry"@en . "529496" . "Ohl\u00EDdal, Ivan" . "3" . "Measurement of mechanical stress in thin films using combined optical method"@en . . "M\u011B\u0159en\u00ED mechanick\u00E9ho nap\u011Bt\u00ED v tenk\u00FDch vrstv\u00E1ch pomoc\u00ED kombinovan\u00E9 optick\u00E9 metody" . . "Ohl\u00EDdal, Miloslav" . .