"53" . "Klang, Pavel" . "X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers" . "Ro\u017Enov pod Radho\u0161t\u011Bm, \u010Cesk\u00E1 republika" . . "Z(MSM 143100002)" . "[A96353E16F1F]" . . "Proceedings of The Ninth Scientific and Business Conference SILICON 2004" . "14310" . "4"^^ . "X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers"@en . "595305" . "We have studied nitrogen-doped silicon wafers (001) using triple-axis high-resolution X-ray diffraction (HRXRD). The reciprocal space intensity distributions from clusters, stacking faults and dislocation loops were modelled using the Krivoglaz theory and a continuum model of the defect deformation field. Good agreement of the theory with the experimental data was achieved for the model of dislocation loops. The symmetry of measured reciprocal space map determines the type of dislocation loops and from cross section we can determine their radius and concentration. These parameters were combined with the results from infrared absorption spectroscopy method." . "Rentgenov\u00FD dif\u00FAzn\u00ED rozptyl od defekt\u016F v dus\u00EDkem legovan\u00FDch k\u0159em\u00EDkov\u00FDch desk\u00E1ch p\u0159ipraven\u00FDch Czochralsk\u00E9ho metodou"@cs . "2004-01-01+01:00"^^ . . "4"^^ . "TECON Scientific, s.r.o." . . "RIV/00216224:14310/04:00010934!RIV08-MSM-14310___" . . . . "X-ray; Diffuse Scattering; Defect; Silicon; Nitrogen doping"@en . . "1"^^ . . . "\u0160ik, Jan" . . . . . . "Hol\u00FD, V\u00E1clav" . . . "X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers" . "\u0160toudek, Richard" . . "We have studied nitrogen-doped silicon wafers (001) using triple-axis high-resolution X-ray diffraction (HRXRD). The reciprocal space intensity distributions from clusters, stacking faults and dislocation loops were modelled using the Krivoglaz theory and a continuum model of the defect deformation field. Good agreement of the theory with the experimental data was achieved for the model of dislocation loops. The symmetry of measured reciprocal space map determines the type of dislocation loops and from cross section we can determine their radius and concentration. These parameters were combined with the results from infrared absorption spectroscopy method."@en . "Pou\u017Eit\u00EDm rentgenov\u00E9 difrakce s vysok\u00FDm rozli\u0161en\u00EDm (HRXRD) jsme studovali dus\u00EDkem dopovan\u00E9 k\u0159em\u00EDkov\u00E9 desky (001). Mapy rozlo\u017Een\u00ED intenzity v reciprok\u00E9m prostoru od shluk\u016F defekt\u016F, vrstevn\u00FDch chyb a disloka\u010Dn\u00EDch smy\u010Dek byly modelov\u00E1ny pou\u017Eit\u00EDm Krivoglazovy teorie a kontinu\u00E1ln\u00EDho modelu deforma\u010Dn\u00EDho pole defektu. Dobr\u00E9 shody teorie s experiment\u00E1ln\u00EDmi daty bylo dosa\u017Eeno pro disloka\u010Dn\u00ED smy\u010Dky. Symetrie nam\u011B\u0159en\u00FDch map reciprok\u00E9ho prostoru ur\u010Duj\u00ED typ disloka\u010Dn\u00EDch smy\u010Dek a z radi\u00E1ln\u00EDho \u0159ezu mapou m\u016F\u017Eeme ur\u010Dit jejich polom\u011Br a koncentraci. Tyto v\u00FDsledky jsme porovnaly s v\u00FDsledky infra\u010Derven\u00E9 absorp\u010Dn\u00ED spektroskopie."@cs . . "RIV/00216224:14310/04:00010934" . "Rentgenov\u00FD dif\u00FAzn\u00ED rozptyl od defekt\u016F v dus\u00EDkem legovan\u00FDch k\u0159em\u00EDkov\u00FDch desk\u00E1ch p\u0159ipraven\u00FDch Czochralsk\u00E9ho metodou"@cs . "X-ray Diffuse Scattering from Defects in Nitrogen-doped Czochralski Grown Silicon Wafers"@en . . "Ro\u017Enov pod Radho\u0161t\u011Bm, \u010Cesk\u00E1 republika" . .