"SPIE's 49th Annual Meeting" . . . . . . . "139-147" . "In this paper the quantitative dependence of the mechanical stress inside diamond-like carbon films containing Si and O atoms on a flow rate ratio of methane CH4 and hexamethyldisiloxane C6H18Si2O in the deposition mixture is determined. For this purpose the modified Stoney's formula is employed. The important quantities taking place in this formula, i.e. the radius of curvature of the spherical surface of a deformed silicon substrate because of the film stress and the film thickness, are determined using the combined optical method based on two-beam interferometry, variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. It is shown that the influence of the flow rate ratio on the values of the mechanical stresses taking place inside these films is negligible within the experimental accuracy achieved for determining these stresses if the total flow rate of gases used to be constant in the deposition mixture. A discussion of this fact is also performed. The film studied w" . . . . . . "14310" . "In this paper the quantitative dependence of the mechanical stress inside diamond-like carbon films containing Si and O atoms on a flow rate ratio of methane CH4 and hexamethyldisiloxane C6H18Si2O in the deposition mixture is determined. For this purpose the modified Stoney's formula is employed. The important quantities taking place in this formula, i.e. the radius of curvature of the spherical surface of a deformed silicon substrate because of the film stress and the film thickness, are determined using the combined optical method based on two-beam interferometry, variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. It is shown that the influence of the flow rate ratio on the values of the mechanical stresses taking place inside these films is negligible within the experimental accuracy achieved for determining these stresses if the total flow rate of gases used to be constant in the deposition mixture. A discussion of this fact is also performed. The film studied w"@en . "Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O" . "RIV/00216224:14310/04:00010888!RIV08-MSM-14310___" . "Franta, Daniel" . "Mechanick\u00E1 nap\u011Bt\u00ED v diamantu podobn\u00FDch uhl\u00EDkov\u00FDch vrstv\u00E1ch obsahuj\u00EDc\u00ED Si a O studovan\u00E1 pomoc\u00ED optick\u00FDch metod"@cs . "Bur\u0161\u00EDkov\u00E1, Vilma" . "V tomto \u010Dl\u00E1nku je ur\u010Dena kvantitativn\u00ED z\u00E1vislost mechanick\u00FDch nap\u011Bt\u00ED uvnit\u0159 diamantu podobn\u00FDch uhl\u00EDkov\u00FDch vrstev obsahuj\u00EDc\u00EDch Si a O na pom\u011Bru pr\u016Ftok\u016F metanu a hexamethyldisiloxanu v deposi\u010Dn\u00ED sm\u011Bsi. Pro tento \u00FA\u010Del je vyu\u017Eita modifikovan\u00E1 Stoneyova formule. V\u00FDznamn\u00E9 veli\u010Diny vyskytuj\u00EDc\u00ED se v t\u00E9to formuli, tj. polom\u011Br k\u0159ivosti sf\u00E9rick\u00E9ho povrchu k\u0159em\u00EDkov\u00E9 podlo\u017Eky deformovan\u00E9 kv\u016Fli nap\u011Bt\u00ED ve vrstv\u011B a tlou\u0161\u0165ka vrstvy, jsou ur\u010Deny pomoc\u00ED dvoupaprskov\u00E9 interference, v\u00EDce\u00FAhlov\u00E9 spektroskopick\u00E9 elipsometrie a spektroskopick\u00E9 reflektometrie aplikovan\u00E9 p\u0159i kolm\u00E9m dopadu sv\u011Btla. Je uk\u00E1z\u00E1no, \u017Ee vliv pom\u011Bru pr\u016Ftok\u016F na hodnoty mechanick\u00E9ho nap\u011Bt\u00ED uvnit\u0159 vrstev je zanedbateln\u00FD v r\u00E1mci experiment\u00E1ln\u00ED p\u0159esnosti dosa\u017Een\u00E9 p\u0159i ur\u010Den\u00ED tohoto nap\u011Bt\u00ED, pokud celkov\u00FD tok plyn\u016F v deposi\u010Dn\u00ED sm\u011Bsi je konstantn\u00ED. Diskuse t\u00E9to skute\u010Dnosti je tak\u00E9 provedena. Studovan\u00E9 vrstvy byly p\u0159ipraveny pomoc\u00ED plasmov\u011B podporovan\u00E9 chemick\u00E9 deposice."@cs . "9"^^ . "[7F6998C1FDA5]" . . "\u010Cudek, Vladim\u00EDr" . "Ohl\u00EDdal, Ivan" . "Bellingham, Washington, USA" . . . "6"^^ . "572710" . . . "SPIE - The International Society for Optical Engineering" . "0-8194-5465-6" . "Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O" . "5"^^ . "2004-01-01+01:00"^^ . "RIV/00216224:14310/04:00010888" . . . "Mechanick\u00E1 nap\u011Bt\u00ED v diamantu podobn\u00FDch uhl\u00EDkov\u00FDch vrstv\u00E1ch obsahuj\u00EDc\u00ED Si a O studovan\u00E1 pomoc\u00ED optick\u00FDch metod"@cs . "P(GA101/04/2131), Z(MSM 143100003)" . "DLC films; mechanical stress; two-beam interferometry"@en . "August 4-5, 2004, Denver, Colorado, USA" . . "Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O"@en . "Ohl\u00EDdal, Miloslav" . "Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O"@en . "\u0160iler, Martin" . . . .