. "Prostorov\u011B rozli\u0161en\u00E9 m\u011B\u0159en\u00ED v rf kapacitn\u00EDm v\u00FDboji v argonu a dus\u00EDku"@cs . . "Spatially resolved measurements in r.f. capacitive discharges in argon and nitrogen" . . . "14310" . . . "Jan\u010Da, Jan" . . "Spatially resolved measurements in r.f. capacitive discharges in argon and nitrogen" . "Plasma potential, electron concentration and IED collected by grounded surface were measured in Ar and nitrogen capacitively coupled r.f. discharges. Langmuir probe and Balzers Plasma Process Monitor (PPM 421), oriented parallel to the movable electrodes allowing a perpendicular spatially resolved measurements. The asymmetry of capacitive coupling estimated from the plasma potential and d.c. self-bias increase for increasing power since the discharge extended towards the grounded PPM orifice, its tubular housing as well as chamber walls. The IEDs measured with PPM reflected the situation at the grounded electrode. It exhibited only one peak which was typically found for low voltage modulated r.f. sheaths. The mean energy of ions depends on their mean free paths. This can be explained by collisions in the sheath. The ion mean energies decreased towards the grounded electrodes in agreement with the plasma potential. The ion and electron concentrations showed similar profiles."@en . "7"^^ . "RIV/00216224:14310/04:00010149" . . . . "Zaj\u00ED\u010Dkov\u00E1, Lenka" . "Spatially resolved measurements in r.f. capacitive discharges in argon and nitrogen"@en . "\u0160m\u00EDd, Radek" . "RIV/00216224:14310/04:00010149!RIV08-MSM-14310___" . "CZ - \u010Cesk\u00E1 republika" . . "P(ME 489), P(OC 527.20), Z(MSM 143100003)" . "[A40A8D48E9A0]" . . . "3"^^ . . "Koncentrace elektron\u016F, energie elektron\u016F, plazmov\u00FD potenci\u00E1l a rozd\u011Blovac\u00ED funkce energie iont\u016F, v argonu a dus\u00EDku. Byla pou\u017Eita Langmuirova sonda a PPM Balzers. Oba diagnostick\u00E9 p\u0159\u00EDstroje byly um\u00EDst\u011Bny paralen\u011B s rovinou elektrod. Pohybliv\u00E9 elektrody umo\u017E\u0148uj\u00ED z\u00EDskat prostorov\u00E9 rozlo\u017Een\u00ED parametr\u016F mezi elektrodami. Rozd\u011Blovac\u00ED funkce energie iontu je za vysok\u00FDch v\u00FDkonu stejn\u00E1 jako pro zemn\u011Bnou elektrodu. Projevuje se zde jeden intenzivn\u00ED p\u00EDk typick\u00FD pro st\u011Bnov\u00E9 vrstvy u elektrod s malou amplitudou. St\u0159edn\u00ED energie Ar+ a N2+ iont\u016F je zhruba 92% energie odpov\u00EDdaj\u00EDc\u00ED plazmov\u00E9mu potenci\u00E1lu. Objevuje se n\u00EDzkoenergetick\u00FD p\u00E1s. Z toho usuzujeme na sr\u00E1\u017Eky ve st\u011Bnov\u00E9 vrstv\u011B, kter\u00E9 nejsou pozorov\u00E1ny pro N+ ionty. Pr\u016Fb\u011Bh st\u0159edn\u00ED energie iont\u016F je ve shod\u011B s pr\u016Fb\u011Bhem plazmov\u00E9ho potenci\u00E1lu. Koncentrace elektron\u016F a iont\u016F maj\u00ED stejn\u00FD profil. Asymetrie v\u00FDboje ov\u011B\u0159ov\u00E1na z pom\u011Bru ploch elektrod z\u00EDzkan\u00FDch z plazmov\u00E9ho potenci\u00E1lu a stejnosm\u011Brn\u00E9ho p\u0159edp\u011Bt\u00ED na z\u00E1klad\u011B n\u011Bkolika model\u016F. Pozorov\u00E1na v\u00FDkonov\u00E1 zm\u011Bna tohoto paramet"@cs . "Czech. J. Phys." . . "54/2004" . . "r.f. capacitive discharge; ion energy distribution; electron energy distribution"@en . "592 - 598" . "Suppl. C" . . "Plasma potential, electron concentration and IED collected by grounded surface were measured in Ar and nitrogen capacitively coupled r.f. discharges. Langmuir probe and Balzers Plasma Process Monitor (PPM 421), oriented parallel to the movable electrodes allowing a perpendicular spatially resolved measurements. The asymmetry of capacitive coupling estimated from the plasma potential and d.c. self-bias increase for increasing power since the discharge extended towards the grounded PPM orifice, its tubular housing as well as chamber walls. The IEDs measured with PPM reflected the situation at the grounded electrode. It exhibited only one peak which was typically found for low voltage modulated r.f. sheaths. The mean energy of ions depends on their mean free paths. This can be explained by collisions in the sheath. The ion mean energies decreased towards the grounded electrodes in agreement with the plasma potential. The ion and electron concentrations showed similar profiles." . "3"^^ . "0011-4626" . . . "Spatially resolved measurements in r.f. capacitive discharges in argon and nitrogen"@en . "Prostorov\u011B rozli\u0161en\u00E9 m\u011B\u0159en\u00ED v rf kapacitn\u00EDm v\u00FDboji v argonu a dus\u00EDku"@cs . . "587288" .