"80-86732-18-5" . "2"^^ . . "Spatial Distribution of Species in an IPVD reactor" . . . "Praha" . "Z(MSM 143100003)" . . "WDS 03 Proceeding of Contributed Papers" . "Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too."@en . "4"^^ . . "Va\u0161ina, Petr" . "Spatial Distribution of Species in an IPVD reactor"@en . "Prostorov\u011B rozlo\u017Een\u00ED \u010D\u00E1stic v IPVD reactorem"@cs . "de Poucques, Ludovic" . "RIV/00216224:14310/03:00025490!RIV09-MSM-14310___" . "Spatial Distribution of Species in an IPVD reactor" . "V\u00FDsledky optick\u00E9 emisn\u00ED a absorp\u010Dn\u00ED spektroskopie z reaktoru obsahuj\u00EDc\u00EDho magnetron a dv\u011B mikrovlnn\u00E9 ant\u00E9ny jsou diskutov\u00E1ny spole\u010Dn\u011B s v\u00FDsledky vrstev z rastrovac\u00EDho elektronov\u00E9ho mikroskopu."@cs . . "Touzeau, Michel" . "Spatial Distribution of Species in an IPVD reactor"@en . . "Charles University in Prague, Faculty of Matema" . . "Prostorov\u011B rozlo\u017Een\u00ED \u010D\u00E1stic v IPVD reactorem"@cs . "2003-06-10+02:00"^^ . "14310" . . . "[3C64EDC58CEC]" . "6"^^ . "MARFYZPRESS, vydavatelstv\u00ED Matematicko-fyzik\u00E1ln\u00ED fakulty University Karlovy v Praze" . . . . "optical emission spectroscopy; optical absorption spectroscopy; IPVD; magnetron"@en . "Bublan, Martin" . "628028" . . "Boisse-Laporte, Caroline" . . . "Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too." . . "Imbert, Jean-Christophe" . "RIV/00216224:14310/03:00025490" . .