. "5182" . "Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry" . . "Ohl\u00EDdal, Miloslav" . "P(GA101/01/1104), P(GA202/01/1110)" . "14310" . "In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters."@en . . . "[A453ECA7400C]" . "Proceedings of SPIE" . "RIV/00216224:14310/03:00008532" . . . "In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters."@cs . . . "Ohl\u00EDdal, Ivan" . . . "3"^^ . "In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters." . . "Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry"@en . "Klapetek, Petr" . "RIV/00216224:14310/03:00008532!RIV08-GA0-14310___" . "600964" . "2" . "0277-786X" . . . "fims nonuniform in optical parameters; optical characterization"@en . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "260-271" . "Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry"@cs . "Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry"@en . "J\u00E1kl, Milo\u0161" . "Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry" . "5"^^ . "11"^^ . "\u010Cudek, Vladim\u00EDr" . . . . . "Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry"@cs .