"Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry." . "Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy" . . "[7C3B85368F68]" . . "Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy"@en . "4"^^ . "Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy"@en . . . . "4"^^ . "0"^^ . "Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry."@en . "0"^^ . . "Jan\u010Da, Jan" . "80-85863-73-1" . . "RIV/00216224:14310/01:00004542" . "Subedi, Deepak Prasad" . "400" . "WDS'01 Proceedings of Contributed Papers" . . . "14310" . "677610" . "RIV/00216224:14310/01:00004542!RIV/2002/MSM/143102/N" . "Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy" . "matfyzpress" . . . "Bur\u0161\u00EDkov\u00E1, Vilma" . . . . . . . "6"^^ . "rf plasma, emission sectroscopy, rotational temperature, actinometry"@en . "Praha" . . . "Praha" . . "P(GA202/00/P037), P(OC 527.20), Z(MSM 143100003)" . . . . "Zaj\u00ED\u010Dkov\u00E1, Lenka" . "2001-01-01+01:00"^^ .