. "14310" . . . . . . "Deposition of diamond like films with an incorporation of silicon by plasma enhanced CVD technique from mixture of methane, argon and hexamethyldisiloxane (HMDSO). Study of the influence of the percentage of HMDSO in the mixture on film properties."@en . . "Subedi, Deepak Prasad" . "Miskolc - Lillaf\u00FCred, Hungary" . "Miskolc - Lillaf\u00FCred, Hungary" . "Jan\u010Da, Jan" . "Deposition of diamond like films with an incorporation of silicon by plasma enhanced CVD technique from mixture of methane, argon and hexamethyldisiloxane (HMDSO). Study of the influence of the percentage of HMDSO in the mixture on film properties." . "P(VS96084), Z(MSM 143100003)" . . . "Abstracts of Invited Lecturers and Contributed Papers ,XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases" . . . . "5"^^ . . "RIV/00216224:14310/00:00003103!RIV/2002/MSM/143102/N" . . "RIV/00216224:14310/00:00003103" . "PECVD, Diamond-like Carbon, Protective thin films, Silicon doping,"@en . "European Physical Society" . "Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films"@en . . "Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films"@en . . . "5"^^ . "Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films" . "0"^^ . "721678" . "0"^^ . "Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films" . . . "2"^^ . "Dvo\u0159\u00E1k, Pavel" . . "2000-01-01+01:00"^^ . . . "408" . "Bur\u0161\u00EDkov\u00E1, Vilma" . "[E70D4DC27E55]" . . "Zaj\u00ED\u010Dkov\u00E1, Lenka" .