"124021" . "Atomic Force Microscopy - Imaging, Measuring and Manipulating Surfaces at the Atomic Scale" . . "line-edge roughness; critical dimensions; spectroscopic scatterometry; near-field microscopy; AFM"@en . "http://www.intechopen.com/books/atomic-force-microscopy-imaging-measuring-and-manipulating-surfaces-at-the-atomic-scale/afm-in-optical-imaging-and-characterization" . . . "20"^^ . "11320" . "RIV/00216208:11320/12:10129409" . . . "978-953-51-0414-8" . . "Anto\u0161, Roman" . . "2"^^ . "Atomic Force Microscopy in Optical Imaging and Characterization" . "2"^^ . . "10.5772/35559" . "[AED68D30E937]" . "Atomic Force Microscopy in Optical Imaging and Characterization" . "P(GP202/09/P355), P(GPP204/10/P346), Z(MSM0021620834)" . "Atomic force microscopy and its advantages and disadvantages are presented in comparison with optical techniques (near-field optical microscopy and optical spectroscopic scatterometry), as well as their mutual cooperation. The methods are analyzed with respect to monitoring rough surfaces, critical dimensions and cross-sectional shapes of patterned nanostructures, and the linewidth and line-edge roughness of patterned elements." . "256"^^ . . . "RIV/00216208:11320/12:10129409!RIV13-GA0-11320___" . . "Rijeka, Croatia" . "Atomic Force Microscopy in Optical Imaging and Characterization"@en . "Atomic Force Microscopy in Optical Imaging and Characterization"@en . . . "Atomic force microscopy and its advantages and disadvantages are presented in comparison with optical techniques (near-field optical microscopy and optical spectroscopic scatterometry), as well as their mutual cooperation. The methods are analyzed with respect to monitoring rough surfaces, critical dimensions and cross-sectional shapes of patterned nanostructures, and the linewidth and line-edge roughness of patterned elements."@en . . "Veis, Martin" . "InTech" . . . "Atomic Force Microscopy, 3" . . . . . . .