. . "6"^^ . "1530-6984" . . "000292849400054" . "241995" . "X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor"@en . "Zhang, JJ" . . "Carbone, D." . "Moers, J." . "For advanced electronic, optoelectronic, or mechanical nanoscale devices a detailed understanding of their structural properties and in particular the strain state within their active region is of utmost importance. We demonstrate that X-ray nanodiffraction represents an excellent tool to investigate the internal structure of such devices in a nondestructive way by using a focused synchotron X-ray beam with a diameter of 400 nm. We show results on the strain fields in and around a single SiGe island, which serves as stressor for the Si-channel in a fully functioning Si-metal-oxide semiconductor field-effect transistor."@en . . "X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor" . "Transistor; Functioning Field-Effect; inside; Dot; Quantum; SiGe; Single; Nanodiffraction; X-ray"@en . . . "10.1021/nl2013289" . "For advanced electronic, optoelectronic, or mechanical nanoscale devices a detailed understanding of their structural properties and in particular the strain state within their active region is of utmost importance. We demonstrate that X-ray nanodiffraction represents an excellent tool to investigate the internal structure of such devices in a nondestructive way by using a focused synchotron X-ray beam with a diameter of 400 nm. We show results on the strain fields in and around a single SiGe island, which serves as stressor for the Si-channel in a fully functioning Si-metal-oxide semiconductor field-effect transistor." . . "X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor"@en . "Mandl, B." . . "7" . "Grutzmacher, D." . "1"^^ . "X-ray Nanodiffraction on a Single SiGe Quantum Dot inside a Functioning Field-Effect Transistor" . . . "Stangl, J." . "Bauer, G." . "RIV/00216208:11320/11:10103789!RIV12-MSM-11320___" . "Jovanovic, V." . . . . "Hrauda, N." . "11320" . . "RIV/00216208:11320/11:10103789" . . "[299F89E615AB]" . . . "Wintersberger, E." . . "Etzelstorfer, T." . "Z(MSM0021620834)" . "Hol\u00FD, V\u00E1clav" . . . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "Nanver, LK" . . "http://pubs.acs.org/doi/full/10.1021/nl2013289" . "14"^^ . "Biasotto, C." . "Nano Letters" . "11" .