"M\u011Bren\u00ED parametr\u016F plazmatu v radiofrekven\u010Dn\u00EDm pochod\u0148ov\u00E9m v\u00FDboji pou\u017Eit\u00E9m pro depozici kysli\u010Dn\u00EDkov\u00FDch tenk\u00FDch vrstev"@cs . . . "Chichina, Mariya" . . . . . "M\u011Bren\u00ED parametr\u016F plazmatu v radiofrekven\u010Dn\u00EDm pochod\u0148ov\u00E9m v\u00FDboji pou\u017Eit\u00E9m pro depozici kysli\u010Dn\u00EDkov\u00FDch tenk\u00FDch vrstev"@cs . "Measurements; Plasma; Parameters; Torch; Discharge; Deposition; Oxide; Films"@en . . "108;113" . . . . "[19E328DFA2FB]" . . "484604" . . . "11320" . "6"^^ . "Tich\u00FD, Milan" . . . "2006-01-01+01:00"^^ . . "Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films"@en . "Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films" . "Matfyzpress" . "Kudrna, Pavel" . "RIV/00216208:11320/06:00002880!RIV07-MSM-11320___" . "Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films"@en . . "Olejn\u00ED\u010Dek, Ji\u0159\u00ED" . "8"^^ . "M\u011Bren\u00ED parametr\u016F plazmatu v radiofrekven\u010Dn\u00EDm pochod\u0148ov\u00E9m v\u00FDboji pou\u017Eit\u00E9m pro depozici kysli\u010Dn\u00EDkov\u00FDch tenk\u00FDch vrstev"@cs . . . "Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films" . . "Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films"@en . . . "RIV/00216208:11320/06:00002880" . "P(GA202/05/2242), P(GA202/06/0776), P(GD202/03/H162), Z(MSM0021620834)" . . . . . "WDS\u00B406 Proceedings of Contributed Papers:Part II-Physics of Plasmas and Ionized Media" . "Prague" . . "Measurements of the Plasma Parameters in RF Torch Discharge Used for Deposition of Oxide Thin Films" . "4"^^ . "Prague" . "80-86732-85-1" . .