"10" . "1895-1082" . "152306" . "Hrabina, Jan" . "5"^^ . . . . . "P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)" . "Multiaxis interferometric displacement measurement for local probe microscopy"@en . . "2012" . . "We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length." . . . "1"^^ . . . . "\u0160er\u00FD, Mojm\u00EDr" . . "http://link.springer.com/article/10.2478%2Fs11534-011-0093-5" . . . . "Multiaxis interferometric displacement measurement for local probe microscopy" . "10.2478/s11534-011-0093-5" . "Multiaxis interferometric displacement measurement for local probe microscopy" . "Central European Journal of Physics" . "Klapetek, Petr" . "Lazar, Josef" . "RIV/00177016:_____/12:#0000543" . . "\u010C\u00EDp, Ond\u0159ej" . "interferometry; microscopy; nanometrology"@en . "[4739C79332D3]" . "DE - Spolkov\u00E1 republika N\u011Bmecko" . "Multiaxis interferometric displacement measurement for local probe microscopy"@en . . . "We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length."@en . . . "7"^^ . "RIV/00177016:_____/12:#0000543!RIV13-AV0-00177016" .