. "Ohl\u00EDdal, I." . . "In this paper, the theoretical analysis of the in\uFB02uence of \uFB01nite linear dimensions of an atomic force microscope tip on pro\uFB01les of the upper boundaries of columnar thin \uFB01lms and their statistical quantities is performed. This analysis is based on a numerical evaluation of the main statistical quantities, i.e. the standard deviations of the heights and slopes, one-dimensional distributions of the probability density of heights and slopes and power spectral density function, corresponding to a simulated columnar structure of the thin \uFB01lms. It is shown that the strongest misrepresentation of the measured pro\uFB01les of the upper boundaries of the columnar \uFB01lms originates in the cases when the linear dimensions of the columns are smaller or comparable with the linear dimensions of the tip. Further, it is shown that using a surface reconstruction procedure one can correct (improve) the boundary pro\uFB01les and their statistical quantities partially." . . "RIV/00177016:_____/03:#0000326" . . "Klapetek, Petr" . "In this paper, the theoretical analysis of the in\uFB02uence of \uFB01nite linear dimensions of an atomic force microscope tip on pro\uFB01les of the upper boundaries of columnar thin \uFB01lms and their statistical quantities is performed. This analysis is based on a numerical evaluation of the main statistical quantities, i.e. the standard deviations of the heights and slopes, one-dimensional distributions of the probability density of heights and slopes and power spectral density function, corresponding to a simulated columnar structure of the thin \uFB01lms. It is shown that the strongest misrepresentation of the measured pro\uFB01les of the upper boundaries of the columnar \uFB01lms originates in the cases when the linear dimensions of the columns are smaller or comparable with the linear dimensions of the tip. Further, it is shown that using a surface reconstruction procedure one can correct (improve) the boundary pro\uFB01les and their statistical quantities partially."@en . "P(GA101/01/1104), P(GA202/01/1110)" . "Theoretical analysis of the atomic force microscopy characterization of columnar thin \uFB01lms"@en . . "RIV/00177016:_____/03:#0000326!RIV11-GA0-00177016" . . "2"^^ . . "94" . "Theoretical analysis of the atomic force microscopy characterization of columnar thin \uFB01lms" . . . . . "Ultramicroscopy" . "10"^^ . "0304-3991" . "11" . "1"^^ . "Theoretical analysis of the atomic force microscopy characterization of columnar thin \uFB01lms" . . . "AFM"@en . "[73781CE1E6EC]" . "Theoretical analysis of the atomic force microscopy characterization of columnar thin \uFB01lms"@en . "630810" . . "NL - Nizozemsko" .