"1"^^ . " revelation of processes" . . "New resources of plasma for creation of thiny layers."@en . . . "0"^^ . . . "Byly z\u00EDsk\u00E1ny nov\u00E9 v\u00FDsledky v obl. vysokov\u00FDkonov\u00E9ho pulzn\u00EDho napra\u0161ov\u00E1n\u00ED vrstev kov\u016F (Cu a Ti) a pulzn\u00ED reaktivn\u00ED magnetronov\u00E9 depozice fotokatalytick\u00FDch vrstev Ti02 a vrstev Al-Si-N s vysokou teplotn\u00ED stabilitou (viz 12 \u010Dl. v mezin\u00E1rodn\u00EDch \u010Dasopisech)."@cs . . "2008-10-27+01:00"^^ . . "2007-03-26+02:00"^^ . . . "new resources of plasma for creation of thiny layers; improvement of screations speed; revelation of processes,which are happening during layers preparation"@en . . "10"^^ . "Nov\u00E9 zdroje plazmatu pro vytv\u00E1\u0159en\u00ED tenk\u00FDch vrstev" . "10"^^ . . "Goal of project is to find new resources of plasma for creation of thiny layers.Spetial attention will be paid on improvement of screations speed and on revelation of processes,which are happening during layers preparation."@en . . . "New results in the fields of high-power pulsed magnetron sputtering of metallic f\u00EDlms (Cu,Ti) and of pulsed reactive magnetron deposition of photocatalytic Ti02 f\u00EDlms and Al-Si-N f\u00EDlms with high thermal stability were achieved (12papers in inter.joumals)"@en . "new resources of plasma for creation of thiny layers" . . "2007-12-31+01:00"^^ . . "ME 673" . "P\u0159edm\u011Btem navr\u017Een\u00E9ho projektu je v\u00FDzkum nov\u00FDch syst\u00E9m\u016F pro p\u0159\u00EDpravu tenk\u00FDch vrstev v plazmatu s c\u00EDlem vytvo\u0159it nov\u00E9 materi\u00E1ly unik\u00E1tn\u00EDch vlastnost\u00ED, objasnit slo\u017Eit\u00E9 procesy p\u0159i jejich p\u0159\u00EDprav\u011B a zv\u00FD\u0161it rychlost jejich vytv\u00E1\u0159en\u00ED." . . . . "http://www.isvav.cz/projectDetail.do?rowId=ME 673"^^ . " improvement of screations speed" . "2003-10-01+02:00"^^ . "0"^^ .