" calculations of EELS spectra" . " interaction electron-molecule" . "Teorie a v\u00FDpo\u010Dty elektronov\u00E9ho rozptylu pro pot\u0159eby nanolitografie" . . . . . "C\u00EDlem Akce CM1301 je pokro\u010Dit ve v\u00FDzkumu natolik, aby EU m\u011Bla realn\u00FD p\u0159edpoklad st\u00E1t se l\u00EDdrem ve v\u00FDvoji a pr\u016Fmyslov\u00E9 nanofabrikace. Rozum\u00ED se t\u00EDm dokonalej\u011B\u00ED zp\u016Fsob pr\u016Fmyslov\u00E9 v\u00FDroby chip\u016F, kter\u00E9 nach\u00E1zej\u00ED pou\u017Eit\u00ED nap\u0159. ve fotovoltaice, medicin\u011B, telekomunikac\u00EDch nebo monitorov\u00E1n\u00ED \u017Eivotn\u00EDho prost\u0159ed\u00ED, abychom jmenovali alespo\u0148 n\u011Bkter\u00E9 aplikace. Sou\u010Dinnost badatel\u016F z komer\u010Dn\u00EDch firem a z\u00E1kladn\u00EDho v\u00FDzkumu v jedn\u00E9 Akci je dobr\u00FDm p\u0159edpokladem pro bezprost\u0159edn\u00ED p\u0159enos znalost\u00ED z laborato\u0159\u00ED do v\u00FDrobn\u00EDch zku\u0161eben. C\u00EDlem programu na\u0161eho p\u0159edlo\u017Een\u00E9ho n\u00E1vrhu je p\u0159isp\u011Bt k uskute\u010Dn\u011Bn\u00ED tohoto pl\u00E1nu svou znalost\u00ED kvantov\u00E9 teorie elektronov\u00E9ho rozptylu a v\u00FDpo\u010Dt\u016F n\u00E1mi vyvinut\u00FDm softwarem. P\u0159edm\u011Btem na\u0161eho v\u00FDzkumu i cel\u00E9 Akce jsou nano\u010D\u00E1stice a jejich interakce s elektrony, tedy objekty a jevy mikrosv\u011Bta, k jejich\u017E popisu a porozum\u011Bn\u00ED je t\u0159eba pou\u017E\u00EDt metod kvantov\u00E9 teorie. Opr\u00E1vn\u011Bn\u011B m\u016F\u017Eeme \u0159\u00EDci, \u017Ee jen v m\u00E1lo oborech v\u011Bdy je tak t\u011Bsn\u00E1 a plodn\u00E1 spolupr\u00E1ce teorie a experimentu jako v tomto p\u0159\u00EDpad\u011B. Pracujeme v oboru u\u017E \u0159adu let a jsme dob\u0159e obezn\u00E1meni se stavem v\u00FDzkumu v Evrop\u011B i jinde ve sv\u011Bt\u011B. Jsme p\u0159ij\u00EDm\u00E1ni jako odborn\u00EDci na problematiku elastick\u00FDch a hlavn\u011B vibra\u010Dn\u011B neelastick\u00FDch sr\u00E1\u017Eek elektron\u016F s polyatomov\u00FDmi molekulami. To se dob\u0159e hod\u00ED pro z\u00E1m\u011Bry Akce CM1301, proto\u017Ee jako perspektivn\u00ED technologii si Akce zvolila zp\u016Fsob FEBID, ve kter\u00E9m jsou hnac\u00ED silou procesu neelastick\u00E9 sr\u00E1\u017Eky elektron\u016F s molekulami. Mnoh\u00E9 podrobnosti mechanismu FEBID nejsou je\u0161t\u011B dob\u0159e zn\u00E1my a k jejich porozum\u011Bn\u00ED bude pot\u0159eba spole\u010Dn\u00E9ho \u00FAsil\u00ED v teorii i experimentu. N\u00E1\u0161 vlastn\u00ED projekt m\u00E1 v\u00FDhodu oproti projekt\u016Fm experiment\u00E1ln\u00EDch partner\u016F v tom, \u017Ee je finan\u010Dn\u011B nen\u00E1ro\u010Dn\u00FD. Po\u017E\u00E1dovan\u00E1 dotace pokryje na\u0161e pot\u0159eby pro \u00FAsp\u011B\u0161nou realizaci napl\u00E1novan\u00FDch \u016Fkol\u00FA." . . "0"^^ . . . "Theory and calculations of electron scattering for needs of nanolithography"@en . "1"^^ . "2014-05-19+02:00"^^ . "2"^^ . . "0"^^ . . "2"^^ . "2015-04-29+02:00"^^ . "2017-05-31+02:00"^^ . . . . "FEBID" . . " theory of electron scattering" . "http://www.isvav.cz/projectDetail.do?rowId=LD14088"^^ . . . " vibrational excitation" . " calculations of electron scattering" . "The subject of the COST Action CM1301 deals with the development of methods known under the acronym FEBID (Focused Electron Beam Induced Deposition). It concerns the deposition of fragments formed by decomposition of molecules of a volatile precursor on a surface of a solid. The process is induced by an electron beam. The objective is to obtain deposited three-dimensional structures with the size of less than 10 nm, that are used in nanotechnologies. For scientific and commercial success of such a technology (called nanolithography) it is necessary to look for new precursors suitable for FEBID, and by means of both experiment and theory to understand better mechanism of chemical reactions of precursors molecule induced by electron impact. The experience accummulated so far shows that the first step in many of these reactions is initiated by vibrational excitation of molecules by electron impact. The applicant is expert in this field of theoretical chemical physics and because of his recent achievements the coordinator of the Action CM1301, Prof. Petra Swiderek, University of Bremen, invited his team to join the Action. The scope of the Action is largely experimental, with the participation of a few industrial companies. The task of the applicant\u2019s group is to help experimentalists in their search for new precursors and optimum reaction conditions. The tool of the applicant\u2019s group are calculations based on the quantum theory of electron scattering by polyatomic molecules. The aim of this project is to look for optimum electron energy and chemical structure of precursors for their vibrational excitation."@en . . "2014-01-25+01:00"^^ . . "LD14088" . "FEBID; calculations of EELS spectra; interaction electron-molecule; vibrational excitation; theory of electron scattering; calculations of electron scattering; resonances"@en . .