. "2013-02-25+01:00"^^ . . "0"^^ . "The main objective of the proposed project is to design and optimize a new hybrid system for HiPIMS deposition of nanostructured perovskite oxides PbZrxTi1-xO3 (PZT) working with high power delivered into the plasma during short time period. The main goal of the project will be research of various combinations of driving discharge pulse generators in parallel connection and working at low (10-1000 Hz) and high (50-400 kHz) frequencies. Another objective of the research will be different combinations of plasma sources such as planar magnetron and plasma jet (operating with hollow cathode) working in HiPIMS mode. The aim therefore is to find such conditions in hybrid systems enabling a deposition of sufficiently homogeneous nanostructured PZT thin films on metal or dielectric substrates of desired structure and stoichiometry and of the highest deposition rate. The aim are related to finding of optimal deposition conditions of hybrid HiPIMS system by using sophisticated plasma diagnostics methods."@en . . . "0"^^ . "perovskite oxide" . " low-temperature plasma" . . "Investigation of hybrid HiPIMS systems for deposition of nanostructured thin films"@en . . " HIPIMS" . . "2014-06-30+02:00"^^ . "1"^^ . " hollow cathode" . "perovskite oxide; magnetron; HIPIMS; hollow cathode; nanostructured films; low-temperature plasma; pulsed dc plasma; plasma diagnostics"@en . . "V r\u00E1mci \u0159e\u0161en\u00E9ho projektu byl realizov\u00E1n hybridn\u00ED HiPIMS depozi\u010Dn\u00ED syst\u00E9m pomoc\u00ED kombinace MF pulzn\u00EDho v\u00FDboje nebo ECWR v\u00FDboje. Hybridn\u00ED syst\u00E9m byl \u00FAsp\u011B\u0161n\u011B diagnostikov\u00E1n metodami n\u00EDzkoteplotn\u00ED diagnostiky plazmatu, optimalizov\u00E1n pro depozice oxidov\u00FDch vrstev r\u016Fzn\u00FDch materi\u00E1l\u016F. Optimalizovan\u00FD hybridn\u00ED syst\u00E9m m\u016F\u017Ee z\u00E1sadn\u011B ovlivnit krystalovou strukturu vrstvy."@cs . . . . "6"^^ . "http://www.isvav.cz/projectDetail.do?rowId=LD12002"^^ . "6"^^ . " magnetron" . . . " nanostructured films" . " pulsed dc plasma" . "The hybrid HiPIMS deposition system using a combination of MF pulsed discharge or ECWR discharge was implemented within the project. The system has been successfully diagnosed with low-temperature plasma diagnostics techniques and optimized for the deposition of oxide layers. First deposition experiments showed that the optimized system may significantly affect the crystal structure of the films."@en . . . . . . "2012-03-01+01:00"^^ . . . "Hlavn\u00EDm c\u00EDlem navrhovan\u00E9ho projektu je konstrukce a optimalizace nov\u00E9ho hybridn\u00EDho HiPIMS syst\u00E9mu pro depozice nanostrukturovan\u00FDch perovskitov\u00FDch oxid\u016F PbZrxTi1-xO3 (PZT) pracuj\u00EDc\u00EDho s vysok\u00FDm v\u00FDkonem v kr\u00E1tk\u00E9m \u010Dasov\u00E9m pulzu plazmatu. Hlavn\u00EDm c\u00EDlem projektu bude v\u00FDzkum r\u016Fzn\u00FDch kombinac\u00ED buzen\u00ED v\u00FDboje paraleln\u00EDm zapojen\u00EDm pulzn\u00EDch gener\u00E1tor\u016F pracuj\u00EDc\u00EDch na n\u00EDzk\u00FDch (10-1000 Hz) a vysok\u00FDch (50-400 kHz) pulzn\u00EDch frekvenc\u00EDch. Dal\u0161\u00EDm c\u00EDlem pak bude v\u00FDzkum r\u016Fzn\u00FDch kombinac\u00ED plazmov\u00FDch zdroj\u016F jako je plan\u00E1rn\u00ED magnetron a plazmov\u00E1 tryska (pracuj\u00EDc\u00ED s dutou katodou a proud\u00EDc\u00EDm plynem) pracuj\u00EDc\u00EDch v HiPIMS m\u00F3du. C\u00EDlem tedy bude nal\u00E9zt takov\u00E9 podm\u00EDnky hybridn\u00EDch syst\u00E9m\u016F, umo\u017E\u0148uj\u00EDc\u00ED deponovat dostate\u010Dn\u011B homogenn\u00ED nanostrukturovan\u00E9 tenk\u00E9 vrstvy PZT na kovov\u00E9 nebo dielektrick\u00E9 substr\u00E1ty po\u017Eadovan\u00E9 struktury a stechiometrie co nejvy\u0161\u0161\u00ED depozi\u010Dn\u00ED rychlost\u00ED. S t\u00EDm souvis\u00ED nalezen\u00ED optim\u00E1ln\u00EDch depozi\u010Dn\u00EDch podm\u00EDnek hybridn\u00EDho HiPIMS syst\u00E9mu pomoc\u00ED sofistikovan\u00FDch diagnostick\u00FDch metod plazmatu." . "LD12002" . "V\u00FDzkum hybridn\u00EDch HiPIMS syst\u00E9m\u016F ur\u010Den\u00FDch pro depozice nanostrukturovan\u00FDch tenk\u00FDch vrstev" . "2013-06-30+02:00"^^ .