"Diagnostika pulzn\u00EDho plazmatu generovan\u00E9ho v syst\u00E9mech s plasmov\u00FDmi kan\u00E1ly ur\u010Den\u00FDch pro technologick\u00E9 aplikace depozice tenk\u00FDch vrstev." . . . "KJB100100805" . . "The proposed project sets a target to carry out a diagnostics of several discharges generated at just slightly reduced or even at atmospheric pressure. These plasmatic systems working with flowing channels - plasma jets were developed recently and succesfully tested in section of Optics of Institute of Physics ASCR. The plasma is generated by means of DC, RF (13.56 MHz) or microwave (2.45 GHz) discharge and/or combination of those. These systems were already applied for low-temperature deposition of , CuNx, ZnO, Li-ZnO, PZT, BTO, STO, BSTO, TiOx thin films and further oxides at sample material surfaces, e.g. polymers. For broader application of those systems the systematic in-situ diagnostic of generated plasma seems to be necessary. The proposed project envisages development of time-resolved calorimetric and Langmuir probe, laser absorption and emission spectroscopy and development of basic model describing a energy transfer from plasma on a substrate."@en . " Langmuir probe" . "2011-06-14+02:00"^^ . " time-resolved" . "Plasma-jet and planar magnetron deposition systems were characterised by several diagnostics methods. One was showed that pulsing of plasma has significant influence on thin film properties. Further both depositing systems demonstrate different behaviour"@en . "0"^^ . "hollow cathode; plasma jet; calorimeter probe; Langmuir probe; emisive spectroscopy; laser absorption spectroscopy; time-resolved; thin film"@en . . "0"^^ . " emisive spectroscopy" . . "1"^^ . "2010-03-09+01:00"^^ . . . "http://www.isvav.cz/projectDetail.do?rowId=KJB100100805"^^ . . "12"^^ . "2008-01-01+01:00"^^ . "A diagnostics of pulsed plasma generated in systems with plasma jets used for technological applications of thin film deposition."@en . . "12"^^ . . . " laser absorption spectroscopy" . " calorimeter probe" . . . . "Navrhovan\u00FD projekt si klade za c\u00EDl prov\u00E1d\u011Bt diagnostiku n\u011Bkolika zdroj\u016F plazmatu generovan\u00FDch za sn\u00ED\u017Een\u00E9ho, p\u0159\u00EDpadn\u011B i atmosf\u00E9rick\u00E9ho tlaku. Tyto plazmatick\u00E9 syst\u00E9my pracuj\u00EDc\u00ED s proud\u00EDc\u00EDmi kan\u00E1ly - plazmatick\u00E9 trysky byly ned\u00E1vno vyvinuty a \u00FAsp\u011B\u0161n\u011B vyzkou\u0161eny v sekci Optika Fz\u00FA AV \u010CR. Plasma v nich je generov\u00E1no pomoc\u00ED stejnosm\u011Brn\u00E9ho, vysokofrekven\u010Dn\u00EDho (13,56 MHz) nebo mikrovlnn\u00E9ho (2,45 GHz) v\u00FDboje, p\u0159\u00EDpadn\u011B jejich kombinacemi. Tyto syst\u00E9my byly ji\u017E \u00FAsp\u011B\u0161n\u011B pou\u017Eity pro n\u00EDzkoteplotn\u00ED vytv\u00E1\u0159en\u00ED vrstev TiNx, CuNx, ZnO, Li-ZnO, PZT, BTO, STO, BSTO, TiOx a dal\u0161\u00EDch oxid\u016F na povr\u0161\u00EDch r\u016Fzn\u00FDch materi\u00E1l\u016F, nap\u0159\u00EDklad polymer\u016F. Pro \u0161ir\u0161\u00ED uplatn\u011Bn\u00ED t\u011Bchto syst\u00E9m\u016F je v\u0161ak nutn\u00E9 prov\u00E9st systematickou in-situ diagnostiku generovan\u00E9ho plazmatu s c\u00EDlem optimalizovat podm\u00EDnky nan\u00E1\u0161en\u00ED vrstev. P\u0159edpokl\u00E1d\u00E1 se v\u00FDvoj a pou\u017Eit\u00ED \u010Dasov\u011B rozli\u0161en\u00E9 kalorimetrick\u00E9 a Langmuirovy sondy, laserov\u00E9 absorp\u010Dn\u00ED a emisn\u00ED spektroskopie a vytvo\u0159en\u00ED z\u00E1kladn\u00EDho modelu p\u0159enosu energie z v\u00FDboje do substr\u00E1tu." . . . . "Tryskov\u00E9 a magnetronov\u00E9 pulzn\u00ED depozi\u010Dn\u00ED syst\u00E9my byly charakterizov\u00E1ny pomoc\u00ED n\u011Bkolika diagnostick\u00FDch metod. Bylo uk\u00E1zano, \u017Ee pulzn\u00ED modulace m\u00E1 v\u00FDznamn\u00FD vliv na vlastnosti p\u0159ipravovan\u00FDch vrstev a nav\u00EDc oba depozi\u010Dn\u00ED syst\u00E9my vykazuj\u00ED rozd\u00EDln\u00E9 chov\u00E1n\u00ED."@cs . " plasma jet" . . "2010-12-31+01:00"^^ . "hollow cathode" .