. "0"^^ . . " finite element method" . "1"^^ . "IAA100650805" . "Vady se\u0159\u00EDzen\u00ED elektronov\u011B optick\u00FDch syst\u00E9m\u016F" . . "2013-06-28+02:00"^^ . "http://www.isvav.cz/projectDetail.do?rowId=IAA100650805"^^ . "electron optics" . . "12"^^ . . . "12"^^ . . . "Fields and aberrations arising due to misalignment of electrodes, polepieces and whole electron and ion optical lenses and systems were studied. For the evaluation of these effects a new plug-in of program EOD was written."@en . . "2010-12-31+01:00"^^ . . "electron optics; aberrations; finite element method; ray tracing"@en . . "Byla studov\u00E1na pole a vady vznikaj\u00EDc\u00ED p\u0159i \u0161patn\u00E9m se\u0159\u00EDzen\u00ED elektrod, p\u00F3lov\u00FDch n\u00E1stavc\u016F a cel\u00FDch elektronov\u011B a iontov\u011B optick\u00FDch \u010Do\u010Dek a soustav. Pro jejich v\u00FDpo\u010Det byl vytvo\u0159en nov\u00FD plug-in programu EOD."@cs . . . . . "Misalignment aberrations in electron optical systems"@en . "Budou studov\u00E1ny vady se\u0159\u00EDzen\u00ED elektronov\u011B optick\u00FDch syst\u00E9m\u016F, kter\u00E9 vznikaj\u00ED v d\u016Fsledku nep\u0159esnost\u00ED v\u00FDroby a sestaven\u00ED elektronov\u011B optick\u00FDch prvk\u016F a jejich soustav. Tyto nep\u0159esnosti se projevuj\u00ED vznikem dodate\u010Dn\u00FDch slab\u00FDch pol\u00ED a vznikem vad zobrazen\u00ED, naz\u00FDvan\u00FDch vady se\u0159\u00EDzen\u00ED nebo poruchov\u00E9 vady, kter\u00E9 omezuj\u00ED spr\u00E1vn\u00E9 chov\u00E1n\u00ED syst\u00E9m\u016F. Struktura t\u011Bchto vad bude analyzov\u00E1na a jednotliv\u00E9 vady budou pops\u00E1ny pomoc\u00ED vhodn\u011B vyj\u00E1d\u0159en\u00FDch koeficient\u016F, kter\u00E9 budou vyj\u00E1d\u0159eny pomoc\u00ED abera\u010Dn\u00EDch integr\u00E1l\u016F. Alternativn\u011B bude vliv vad se\u0159\u00EDzen\u00ED ur\u010Den z p\u0159esn\u00E9ho trasov\u00E1n\u00ED nabit\u00FDch \u010D\u00E1stic neporu\u0161en\u00FDm a poru\u0161en\u00FDm syst\u00E9mem, koeficienty vad obdr\u017E\u00EDme fitov\u00E1n\u00EDm a vliv vad bude zobrazen graficky pomoc\u00ED profil\u016F stopy a abera\u010Dn\u00EDch obrazc\u016F. Ur\u010Den\u00ED vlivu vad se\u0159\u00EDzen\u00ED bude implementov\u00E1n jako roz\u0161\u00ED\u0159en\u00ED programu EOD, pou\u017E\u00EDvan\u00E9mu v \u00FAstavu pro n\u00E1vrh v elektronov\u00E9 optice. Pro odstran\u011Bn\u00ED vlivu vad se\u0159\u00EDzen\u00ED se v syst\u00E9mech zav\u00E1d\u011Bj\u00ED korek\u010Dn\u00ED prvky; jejich vliv na zobrazen\u00ED bude tak\u00E9 studov\u00E1n." . "2010-03-09+01:00"^^ . . . "Misalignment aberrations of electron optical systems arise due to manufacturing or alignment imperfections of electron optical elements or systems. They give rise to additional small fields and to image aberrations called misalignement errors, which limit correct behavior of electron optical systems. The structure of these errors will be analyzed and individual aberrations will be expressed in terms of aberration coefficients and integrals. The effect of perturbations will also be determined from accurate tracing through perfect and perturbed system, the aberration coefficients will be obtained by fitting and their effect will be displayed graphically by spot profiles and aberration figures. The determination of misalignment fields and aberrations will be implemented in program EOD, used in the institute for the electron optical design. In order to cancel the perturbation errors, correctors are implemented in electron optical systems and their effect on imaging will also be studied."@en . " aberrations" . . . "2008-01-01+01:00"^^ . . "0"^^ .