"1"^^ . . . . . . "Byla vypracov\u00E1na technologie \u00FApravy povrchu a depozice vrstev pomoc\u00ED n\u00EDzko- i vysokotlak\u00E9 RF plazmov\u00E9 trysky vhodn\u00E1 zejm\u00E9na pro \u00FApravu povrch\u016F dutin a nerovn\u00FDch substr\u00E1t\u016F. P\u0159\u00EDnosem je rovn\u011B\u017E vyvinut\u00FD syst\u00E9m optick\u00E9 a sondov\u00E9 'in situ' diagnostiky plazmat"@cs . . "0"^^ . . . "Konfigurace plasmachemick\u00E9ho reaktoru s jednou dutou katodou, kter\u00E1 z\u00E1rove\u0148 slou\u017E\u00ED jako tryska, kterou se vh\u00E1n\u00ED pracovn\u00ED plyn do reaktoru se uk\u00E1zala jako velmi perspektivn\u00ED z hlediska nan\u00E1\u0161en\u00ED tenk\u00FDch vrstev a k povrchov\u00E9 \u00FAprav\u011B materi\u00E1l\u016F. Experimenty toti\u017E prok\u00E1zaly velkou chemickou aktivitu v generovan\u00E9m plazmatick\u00E9m kan\u00E1lu a uk\u00E1zaly, \u017Ee je mo\u017Eno nan\u00E1\u0161et tenk\u00E9 vrstvy z definovanou stechiometri\u00ED. Nap\u0159. Ge3N4, Cu3N, v posledn\u00ED dob\u011B t\u00E9\u017E byly provedeny experimenty s C3N4. Experimenty rovn\u011B\u017E prok\u00E1zaly, \u017Ee je mo\u017Eno nan\u00E1\u0161et tenk\u00E9 vrstvy a prov\u00E9st povrchovou \u00FApravu materi\u00E1l\u016F v dutin\u00E1ch a na substr\u00E1tech komplikovan\u00FDch tvar\u016F. Z hlediska dal\u0161\u00EDho technologick\u00E9ho vyu\u017Eit\u00ED reaktoru s dut\u00FDmi katodami se ukazuje velmi perspektivn\u00ED, \u017Ee pou\u017Eit\u00ED multikatodov\u00E9ho syst\u00E9mu m\u016F\u017Ee umo\u017Enit nan\u00E1\u0161en\u00ED kompozitn\u00EDch vrstev a slo\u017Eit\u00FDch vrstevnat\u00FDch struktur. P\u0159edb\u011B\u017En\u00E9 experimenty uk\u00E1zaly, \u017Ee je mo\u017Eno zvy\u0161ovat tlak pracovn\u00EDho plynu a\u017E do atmosferick\u00E9ho tlaku. Pro v\u00FDvoj plasmachemick\u00E9ho reaktoru s multikatodov\u00FDm syst\u00E9mem se ukazuje ja" . . "V\u00FDvoj a plazma-chemick\u00E9 aplikace supersonick\u00E9ho tryskov\u00E9ho syst\u00E9mu dut\u00FDch katod v plazma-chemick\u00E9m reaktoru" . . . . "The goal of the proposed project is to carry out the complex study of the physicals and the physical and the plasmachemical processes in the multi-hollow-cathode jet. The project is based on the results of the research obtained with one hollow-cathode plasma-chemical reactor. The experiments proved namely the major chemical activity in the generated plasma channel and showed that it is possible to deposit the thin films with the defined stoichiometry. Fot example Ge3N4, Cu3N and recently C3N4. From the point of view of further technological use of the reactor with the hollow cathode it can be shown that the use of the multicathode syst\u00E9m can enable to deposit the composite layers and complicated sandwich structures and also deposit the thin films onto hollow and substrates of the complicated shape. Furthermore preliminary experiments showed that it is possible to increase the working gas pressure up to the atmospheric one. For the development of the plasma-chemical reactor with the multi-cathode syst\u00E9"@en . "http://www.isvav.cz/projectDetail.do?rowId=GA202/98/0666"^^ . . "GA202/98/0666" . . . "3"^^ . "The development and application of the supersonic multi-hollow-cathode syst\u00E9m for the plasma-chemical reactor"@en . . "0"^^ . "3"^^ .