"http://www.isvav.cz/projectDetail.do?rowId=GA202/93/0508"^^ . . . . "XXX"@cs . . "C\u00EDlem projektu je prozkoum\u00E1n\u00ED mechanismu n\u00EDzkotlakov\u00E9ho rozpra\u0161ov\u00E1n\u00ED (NTR) vybran\u00FDch materi\u00E1l\u016F p\u0159i tlac\u00EDch rozpra\u0161ovac\u00EDho plynu \u0159\u00E1dov\u011B ni\u017E\u0161\u00EDch ne\u017E cca O,1 Pa a nalezen\u00ED fyzik\u00E1ln\u00EDch omezen\u00ED NTR. Projekt se soust\u0159ed\u00ED zejm\u00E9na na (1) prozkoum\u00E1n\u00ED rozpra\u0161ov\u00E1n\u00EDv p\u0159\u00EDtomnosti pomocn\u00E9ho vf a mikrovlnn\u00E9ho v\u00FDboje a v\u00FDzkum ionizace pracovn\u00ED atmosf\u00E9ry s vyu\u017Eit\u00EDm ECR a helikonov\u00FDch elektromagnetick\u00FDch vln, (2) teoretick\u00FD rozbor NTR a selfsputteringu, (3) v\u00FDzkum a v\u00FDvoj nov\u00FDch rozpra\u0161ovac\u00EDch zdroj\u016F pro NTR a to i pro eromagnetick\u00E9 materi\u00E1ly, (4) prok\u00E1z\u00E1n\u00ED mo\u017Enosti selfsputteringu vybran\u00FDch materi\u00E1l\u016F, jak prvk\u016F tak slitin, (5) diagnostiku plazmatu p\u0159i NTR, zejm\u00E9na v\u00FDzkum ionizace rozpra\u0161ovan\u00E9ho materi\u00E1lu a (6) srovn\u00E1n\u00ED vlastnost\u00ED a mikrostruktury vybran\u00FDch vrstev vytv\u0159en\u00FDch bombardem iont\u016F plynu a kovu." . . . "Sputtering of Thin Films at Very Low Pressures"@en . . "1"^^ . . "2"^^ . . "1"^^ . "1"^^ . . "0"^^ . . . "GA202/93/0508" . . . "Napra\u0161ov\u00E1n\u00ED vrstev p\u0159i velmi n\u00EDzk\u00FDch tlac\u00EDch" .