"2008-12-31+01:00"^^ . "Hlavn\u00EDm \u00FA\u010Delem projektu bylo podrobn\u00E9 pochopen\u00ED fyzik\u00E1ln\u011B-chemick\u00FDch d\u011Bj\u016F v H-PLD procesu (Hybridn\u00ED pulzn\u00ED laserov\u00E1 depozice), sledov\u00E1n\u00ED meziprodukt\u016F d\u011Bje a s t\u00EDm souvisej\u00EDc\u00ED spektroskopick\u00E1 identifikace dosud experiment\u00E1ln\u011B nepozorovan\u00FDch sp\u00E9ci\u00ED. Sou\u010Das"@cs . . "The main purpose of the Project was the detailed understanding of the physical-chemistry phenomena of the Hybrid pulsed laser deposition process, the investigation of the interlude products and consequent spectroscopic identification of possible new spec"@en . . . "http://www.isvav.cz/projectDetail.do?rowId=GA202/06/0216"^^ . "2009-10-22+02:00"^^ . . . . . "2008-04-25+02:00"^^ . . "Study of plasma formed in hybrid arrangement of pulsed laser deposition"@en . . . . . . . . "plasma; pulsed laser deposition"@en . "1"^^ . "The hybrid laser deposition method (H-PLD) of thin layers is a new deposition technology combined the pulsed laser deposition with applied discharges or sources of plasma (DC, RF, hollow cathode discharges, combination with magnetrone, etc.). The H-PLD method is already well-understood and provides thin layers with the required quality. However, the basic physical and chemical processes constituting the described process have not been fully elucidated. The goal is to employ spectroscopic methods to obtain basic information on the presence of reactive molecules in the H-PLD plasma and on the dynamics of propagating of the plasma plume at medium pressures (units to hundreds of Pa) and to further improve the method on the basis of the information obtained. The main target is a more detailed understanding of chemical and physical phenomena in the H-PLD process, monitoring of the formation of chemical intermediates and an attempt at detection and spectroscopic identification of species that have"@en . . "2"^^ . . "GA202/06/0216" . "plasma" . "Metodika hybridn\u00ED laserov\u00E9 depozice (H-PLD) tenk\u00FDch vrstev je novou depozi\u010Dn\u00ED technikou kombinuj\u00EDc\u00ED pulzn\u00ED laserovou depozici s dal\u0161\u00EDmi v\u00FDboji \u010Di zdroji plazmatu (DC a RF v\u00FDboj, v\u00FDboj v dut\u00E9 katod\u011B, kombinace s magnetronem, aj.). V n\u011Bkter\u00FDch p\u0159\u00EDpadech jedepozi\u010Dn\u00ED \u010D\u00E1st t\u00E9to technologie zvl\u00E1dnuta a poskytuje speci\u00E1ln\u00ED tenk\u00E9 vrstvy po\u017Eadovan\u00FDch kvalit. Z\u00E1kladn\u00ED fyzik\u00E1ln\u00ED a chemick\u00E9 d\u011Bje tvo\u0159\u00EDc\u00ED popisovan\u00FD proces v\u0161ak nejsou dosud zcela objasn\u011Bny. C\u00EDlem p\u0159edkl\u00E1dan\u00E9ho projektu je pomoc\u00ED spektroskopick\u00FDch a dal\u0161\u00EDch metod z\u00EDskat z\u00E1kladn\u00ED informace o p\u0159\u00EDtomnosti reaktivn\u00EDch molekul (speci\u00ED) v H-PLD plazmatu a dynamice \u0161\u00ED\u0159en\u00ED plazmatick\u00E9ho oblaku p\u0159i st\u0159edn\u00EDch tlac\u00EDch (jednotky a\u017E stovky Pa) a na z\u00E1klad\u011B z\u00EDskan\u00FDch informac\u00ED metodu depozice d\u00E1le zdokonalit. Hlavn\u00EDm c\u00EDlem je podrobn\u011Bj\u0161\u00ED pochopen\u00ED chemick\u00FDch a fyzik\u00E1ln\u00EDch jev\u016F v H-PLD procesu, sledov\u00E1n\u00ED vzniku chemick\u00FDch meziprodukt\u016F a pokus o detekci a spektroskopickou identifikaci dosud experiment\u00E1ln\u011B nepozorovan\u00FDch speci\u00ED nap\u0159. karbid\u016F a nitrid\u016F" . "22"^^ . . "0"^^ . "22"^^ . "Studium plazmatu vznikaj\u00EDc\u00EDho p\u0159i hybridn\u00ED modifikaci pulzn\u00ED laserov\u00E9 depozice" . "2006-01-01+01:00"^^ .