"T\u011B\u017Ei\u0161t\u011B projektu je v\u00A0p\u0159\u00EDprav\u011B kvalitn\u00EDch diamantov\u00FDch vrstev metodou deposice rozkladem plynn\u00E9 f\u00E1ze v\u00A0mikrovlnn\u00E9m plasmatu (microwave plasma enhanced chemical vapour deposition, MW PE-CVD). Bude pou\u017Eita nov\u011B vyvinut\u00E1 komer\u010Dn\u00ED aparatura firmy AIXTRON s\u00A0na\u0161\u00ED modifikac\u00ED umo\u017E\u0148uj\u00EDc\u00ED dopov\u00E1n\u00ED a kontrolu povrchov\u00E9 vodivosti u homoepitaxn\u00EDch vrstev a r\u016Fst heteroepitaxn\u00EDch vrstev a\u017E do pr\u016Fm\u011Bru 5 cm. Bude studov\u00E1na p\u0159\u00ED\u010Dina d\u011Brov\u00E9 povrchov\u00E9 vodivosti diamantov\u00FDch vrstev terminovan\u00FDch vod\u00EDkem, elektronov\u00E1 vodivost v\u00A0povrchov\u00E9 vrstv\u011B bude dosa\u017Eena dopov\u00E1n\u00EDm fosforem \u010Di jin\u00FDm dopantem. Bude teoreticky a experiment\u00E1ln\u011B studov\u00E1n proces nukleace, povrchov\u00E9 rekonstrukce a mechanismu r\u016Fstu, co\u017E je nezbytn\u00E9 pro \u00FAsp\u011B\u0161n\u00E9 dopov\u00E1n\u00ED vrstev. Bude pou\u017Eita \u0159ada optick\u00FDchspektroskopick\u00FDch metod (fototerm\u00E1ln\u00ED deflek\u010Dn\u00ED spektroskopie, metoda konstantn\u00EDho fotoproudu, Fourierovsk\u00E1 fotovodivostn\u00ED spektroskopie v\u00A0infra\u010Derven\u00E9 oblasti, klasick\u00E1 Fourierovsk\u00E1 infra\u010Derven\u00E1 spektroskopie) sou\u010Dasn\u011B s\u00A0elektronovou paramagnetickou" . . . "MW PE chemical vapour deposition of diamond layers and study of electronic and biofunctional surface properties"@en . . "Task no. 1: We have optimized technology of polycrystalline diamond layers by Microwave plasma assisted chemical vapor deposition. We have modified our reactor for bias enhanced nucleation and reached homogeneous nuclei density 3-4 x 1010 cm-2 and added"@en . . . . . "2008-06-02+02:00"^^ . "http://www.isvav.cz/projectDetail.do?rowId=GA202/02/0218"^^ . "\u00DAkol \u010D. 1: Byl \u00FAsp\u011B\u0161n\u011B zvl\u00E1dnut technologick\u00FD proces deposice polykrystalick\u00FDch vrstev metodou MWPE CVD, zavedli jsme nukleaci vrstev in situ p\u0159\u00EDmo v na\u0161em reaktoru s reprodukovateln\u011B vysokou hustotou nuklea\u010Dn\u00EDch center 3-4 x 1010 cm-2. Toto pak umo\u017Enilo"@cs . . "GA202/02/0218" . . "5"^^ . "P\u0159\u00EDprava diamantov\u00FDch vrstev metodou MW PECVD a kontrola povrchov\u00FDch elektronick\u00FDch a bioaktivn\u00EDch vlastnost\u00ED" . . . . . "5"^^ . . . . "1"^^ . . . "Microwave plasma assisted chemical vapour deposition (MW PE-CVD) will be used for heteroepitaxial and homoepitaxial growth of diamond layers. Heteroepitaxial wafers of 5 cm in diameter of optical quality will be grown. Homoepitaxial growth on diamond substrates will be studied both theoretically and experimentally, including proces of nucleation and mechanism of epitaxial growth, aiming at preparation of atomically flat surfaces. The tailing-up of the substrates by overgroing the substrate boundary with epitaxial layer will be studied with a goal to prepare the large single crystal CVD diamond layers. Phosphorus and other n-type doping will be carried out. We will study the origin of surface hole conductivity in diamond layers terminated with the hydrogen aiming at future biosensing applications. Electric conductivity in doped epitaxial layers will be investigated too. Various optical spectroscopic methods (photothermal deflection spectroscopy, constant photocurrent method, photocurrent detected"@en . "0"^^ . . . "0"^^ . "Neuvedeno."@en .