. " vacuum deposition" . " microwaves" . "http://www.isvav.cz/projectDetail.do?rowId=FT-TA2/018"^^ . " plasma" . "microelectronics; sensorics; laser beam; ion beam; UV light; microwaves; misro-films; nano-films; plasma; vacuum deposition; wet deposition"@en . . "7"^^ . "7"^^ . . " ion beam" . . . . . . "Technologie energetick\u00FDch svazk\u016F (laseru, iontov\u00E9 svazky, expozice UV z\u00E1\u0159en\u00EDm a mikrovlnami, napra\u0161ov\u00E1n\u00ED a iontov\u00E9 lept\u00E1n\u00ED, plazmatick\u00E9 procesy), nan\u00E1\u0161en\u00ED nano- a mikro- vrsdtev, integrace na korundov\u00FDch substr\u00E1tech v aplikaci na HIC a senzorov\u00E9 moduly."@cs . . "0"^^ . . "High- tech energy beams technologies for deposition and treatment of films for electronics production."@en . . "Pokro\u010Dil\u00E9 svazkov\u00E9 technologie vytv\u00E1\u0159en\u00ED a zpracov\u00E1n\u00ED vrstev pro v\u00FDrobn\u00ED praxi v elektronice." . "2010-04-14+02:00"^^ . "1"^^ . " sensorics" . "High energy beams technologies (laser beams, ion beams, UV light and microwave exposures, sputtering and ion etching, plasma processing), nano- and micro- films deposition, their integration on alumina substrates, applied on HIC and sensor modules."@en . "3"^^ . . " misro-films" . "2008-12-31+01:00"^^ . "2008-05-07+02:00"^^ . . . . . . "FT-TA2/018" . "microelectronics" . . " UV light" . "Advanced technologies for microelectronics and sensorics based on the combination of the high-tech energy beams technologies (laser beams, ion beams, UV light and microwavw exposures) and those of micro- and nano-films deposited by vacuum, plasma and wet processes as well. The selectivity of processes accompanied by a high resolution of lines and gaps of the film structures is of primary importance in the development."@en . . " laser beam" . "Pokro\u010Dil\u00E9 technologie pro mikroelektroniku a senzoriku zalo\u017Een\u00E9 na kombinaci technologi\u00ED energetick\u00FDch svazk\u016F (laser, UV z\u00E1\u0159en\u00ED, iontov\u00E9 svazky, mikrovlnn\u00E9 z\u00E1\u0159en\u00ED apod.) a technologi\u00ED mikro- a nano-vrstev nan\u00E1\u0161en\u00FDch vakuov\u00FDmi technikami, plasmatick\u00FDmi technikami i mokr\u00FDmi procesy. D\u016Fraz je kladen na selektivitu proces\u016F s v\u00FDrazn\u011B vysok\u00FDm rozli\u0161en\u00EDm \u0161\u00ED\u0159ky drah a mezer vytv\u00E1\u0159en\u00FDch struktur." . " nano-films" .