" wafer metrology" . . "2013-10-01+02:00"^^ . . "1"^^ . "European 450mm Equipment Demo Line"@en . "0"^^ . . "7H13015" . "450 mm technology; STEM; wafer metrology; electron optical simulations"@en . "http://www.isvav.cz/projectDetail.do?rowId=7H13015"^^ . "0"^^ . "0"^^ . . . . . . . "The E450EDL project aims at the demonstration of 450mm readiness equipment ensuring the realization of a 450mm key enabling technology pilot line. The overall goal of the E450EDL project is to install a 450mm Equipment Demo Line at imec equipped with European systems implementing first critical modules."@en . " STEM" . . . . "The E450EDL project aims at the demonstration of 450mm readiness equipment ensuring the realization of a 450mm key enabling technology pilot line. The overall goal of the E450EDL project is to install a 450mm Equipment Demo Line at imec equipped with European systems implementing first critical modules." . . "European 450mm Equipment Demo Line" . "450 mm technology" . . "2016-10-01+02:00"^^ . . "0"^^ . . "2015-03-20+01:00"^^ . "2014-02-14+01:00"^^ .