"The E450EDL project aims at the demonstration of 450mm readiness equipment ensuring the realization of a 450mm key enabling technology pilot line. The overall goal of the E450EDL project is to install a 450mm Equipment Demo Line at imec equipped with European systems implementing first critical modules." . "European 450mm Equipment Demo Line" . "0"^^ . "http://www.isvav.cz/projectDetail.do?rowId=7H13003"^^ . . . . . "2015-03-20+01:00"^^ . "0"^^ . . "2013-10-01+02:00"^^ . "The E450EDL project aims at the demonstration of 450mm readiness equipment ensuring the realization of a 450mm key enabling technology pilot line. The overall goal of the E450EDL project is to install a 450mm Equipment Demo Line at imec equipped with European systems implementing first critical modules."@en . "European 450mm Equipment Demo Line"@en . "450 mm technology; STEM; wafer metrology; electron optical simulations"@en . "7H13003" . . . "450 mm technology" . "2016-10-01+02:00"^^ . . "2014-02-14+01:00"^^ . " wafer metrology" . . . . " STEM" . . "1"^^ . . . . "0"^^ . . "0"^^ .