"0"^^ . . "2015-03-31+02:00"^^ . " confocal Raman microscopy" . . "1. Removing technical barriers to reach physical limits \u2013 UniSEM chamber design 2. Dual electron and ion beam instrument improvements: advanced SEM immersion optics and plasma FIB 3. Development of improved TOF-SIMS sensitivity and lateral resolution 4. Improved secondary ion yields by controlling surface chemistry 5. Integration of probe methods in to the charged particles analytical system 6. Integration of optical methods in to the charged particles analytical system 7. Full integration of all techniques to the unique UniSEM prototype, software development and demonstration of novel capabilities 8. 3D analysis in a tomography approach using combined analytical techniques" . . "0"^^ . " focused ion beam" . " scanning probes" . . . . . "2012-04-01+02:00"^^ . . "1. Removing technical barriers to reach physical limits \u2013 UniSEM chamber design 2. Dual electron and ion beam instrument improvements: advanced SEM immersion optics and plasma FIB 3. Development of improved TOF-SIMS sensitivity and lateral resolution 4. Improved secondary ion yields by controlling surface chemistry 5. Integration of probe methods in to the charged particles analytical system 6. Integration of optical methods in to the charged particles analytical system 7. Full integration of all techniques to the unique UniSEM prototype, software development and demonstration of novel capabilities 8. 3D analysis in a tomography approach using combined analytical techniques"@en . "scanning electron microscopy" . . "http://www.univsem.eu/"^^ . "2014-03-27+01:00"^^ . . . "Universal SEM as a multi-nano-analytic tool - UnivSEM"@en . "http://www.isvav.cz/projectDetail.do?rowId=7E12087"^^ . " elemental and molecular analysis in nanometres" . . "7E12087" . " chemical imaging" . "Universal SEM as a multi-nano-analytic tool - UnivSEM" . . . . . "2015-04-02+02:00"^^ . "scanning electron microscopy; focused ion beam; elemental and molecular analysis in nanometres; scanning probes; SPM; confocal Raman microscopy; chemical imaging; 3D tomography; TOF-SIMS"@en . . "0"^^ . . "1"^^ . " SPM" . "0"^^ . " 3D tomography" .