"Metrology of small structures for the manufacturing of electronic and optical devices"@en . . . . "http://www.ptb.de/cms/en/fachabteilungen/abt8/fb-84/ag-841/small-structures.html"^^ . . "2012-01-01+01:00"^^ . . "Finite Difference in Time Domain; scatterometry; atomic force microscopy; nanostructures"@en . "2014-09-30+02:00"^^ . . "0"^^ . . "1"^^ . . . "0"^^ . "Finite Difference in Time Domain" . "Metrologie mal\u00FDch struktur pro v\u00FDrobu elektronick\u00FDch a optick\u00FDch za\u0159\u00EDzen\u00ED" . "0"^^ . . " atomic force microscopy" . . "7AX12105" . . . . . "0"^^ . "The aim of the project is to provide a fast and very accurate analysis of geometrical properties of nanostructures usable in industrial processes. For such purposes it is often needed to use a measurement of the light dispersion which provides on some typical samples (such as diffraction gratings) enough information about the morphology of the sample. The objective of this project is therefore to develop robust tools for light dispersion data analysis. As a supplementary method the atomic force microscopy is used which is capable to provide a direct information on morphology. It is however a slower and limited range technique. By comparison of both methods it will be possible to optimalize the process of detection of the surface morphology discovered by the optical technique and to specify particular uncertainties of such measurements. The CMI 's objective in this project is to perform a FDTD (Finite Difference in Time Domain) calculation of the light scattering."@en . "Projekt je zam\u011B\u0159en zejm\u00E9na na rychlou a vysoce p\u0159esnou anal\u00FDzu geometrick\u00FDch vlastnost\u00ED nanostruktur, kter\u00E1 by byla vyu\u017Eiteln\u00E1 v pr\u016Fmyslov\u00FDch procesech. Pro takov\u00E9 \u00FA\u010Dely je \u010Dasto vhodn\u00E9 vyu\u017E\u00EDvat m\u011B\u0159en\u00ED rozptylu sv\u011Btla, kter\u00E9 na n\u011Bkter\u00FDch typick\u00FDch struktur\u00E1ch (jako jsou nap\u0159. difrak\u010Dn\u00ED m\u0159\u00ED\u017Eky) samo o sob\u011B poskytuje dostatek informace o morfologii vzorku. C\u00EDlem projektu je proto vyvinout robustn\u00ED n\u00E1stroje pro anal\u00FDzu dat z rozptylu sv\u011Btla. Jako dopl\u0148uj\u00EDc\u00ED metoda je vyu\u017Eita mikroskopie atom\u00E1rn\u00EDch sil, kter\u00E1 je schopna poskytnout informace o morfologii p\u0159\u00EDmo, a\u010D mnohem pomaleji a na men\u0161\u00ED plo\u0161e. Porovn\u00E1n\u00EDm obou metod bude mo\u017En\u00E9 optimalizovat proces detekce morfologie povrch\u016F z optick\u00FDch dat a stanovit jednotliv\u00E9 nejistoty p\u0159i takov\u00FDch m\u011B\u0159en\u00EDch. \u010CMI se v projektu zam\u011B\u0159uje na v\u00FDpo\u010Dty rozptylu metodou FDTD (Finite Difference in Time Domain)." . "2014-06-12+02:00"^^ . . "2013-03-27+01:00"^^ . . "http://www.isvav.cz/projectDetail.do?rowId=7AX12105"^^ . " scatterometry" . .