"7AX12104" . . . . . "http://www.ptb.de/emrp/ind10-home.html"^^ . "Flatness metrology - This JRP will considerably improve absolute flatness measurements. The results of the investigation of the ability of capacitive sensors to reach an uncertainty of 10 nm in scanning applications will be significant for common industrial use in flatness measurements. Optical imaging metrology for curved surfaces - This JRP will develop and realise a new instrument based on recently invented tilted-wave interferometry. Tactile and optical single point metrology for curved surfaces - This JRP will lead to a reduction of the current measurement uncertainty by a factor of at least 2, i.e. down to 50 nm or less. Data analysis - This JRP will develop new algorithms and software including advanced computational geometry and high-level surface fitting for 3D freeform surface reconstruction and characterisation." . "free form; flatness; aspheric; interferometry; scanning; tactile; optical"@en . " tactile" . "Optical and tactile metrology for absolute form characterisation"@en . " interferometry" . "http://www.isvav.cz/projectDetail.do?rowId=7AX12104"^^ . . "Flatness metrology - This JRP will considerably improve absolute flatness measurements. The results of the investigation of the ability of capacitive sensors to reach an uncertainty of 10 nm in scanning applications will be significant for common industrial use in flatness measurements. Optical imaging metrology for curved surfaces - This JRP will develop and realise a new instrument based on recently invented tilted-wave interferometry. Tactile and optical single point metrology for curved surfaces - This JRP will lead to a reduction of the current measurement uncertainty by a factor of at least 2, i.e. down to 50 nm or less. Data analysis - This JRP will develop new algorithms and software including advanced computational geometry and high-level surface fitting for 3D freeform surface reconstruction and characterisation."@en . . "2014-08-31+02:00"^^ . " aspheric" . " scanning" . . " flatness" . . "2013-03-27+01:00"^^ . "2012-01-01+01:00"^^ . . . "0"^^ . "2014-06-12+02:00"^^ . . . . . "1"^^ . . "free form" . . "1"^^ . . "0"^^ . "1"^^ . "Optical and tactile metrology for absolute form characterisation" .