"0"^^ . "thin films; traceability; digital reflectometry"@en . "7AX12102" . . "2014-06-12+02:00"^^ . "2013-03-27+01:00"^^ . . . . . . "2014-07-31+02:00"^^ . . "http://projects.npl.co.uk/optoelectronic_films/project.html"^^ . "2012-01-01+01:00"^^ . . "thin films" . . . . "V r\u00E1mci projektu se \u0159e\u0161\u00ED ot\u00E1zky charakterizace tenk\u00FDch vrstev. Jednotliv\u00E9 \u00FAkoly jsou n\u00E1sleduj\u00EDc\u00ED: - n\u00E1vaznost, vz\u00E1jemn\u00E9 srovn\u00E1n\u00ED a validace metod p\u0159i ur\u010Dov\u00E1n\u00ED materi\u00E1lov\u00FDch vlastnost\u00ED relevantn\u00EDch pro tenkovrstevnat\u00E9 syst\u00E9my, - v\u00FDvoj a vyhodnocen\u00ED metod m\u011B\u0159en\u00ED pro slo\u017Eit\u00E9 vrstevnat\u00E9 syst\u00E9my, - metrologie aplikovateln\u00E1 p\u0159i kontrole kvality ve v\u00FDrobn\u00EDm procesu. \u010CMI se bude v r\u00E1mci projektu zab\u00FDvat m\u011B\u0159en\u00EDm odrazivosti na velk\u00E9 plo\u0161e vzorku. Jedn\u00E1 se metodu zn\u00E1mou jako digit\u00E1ln\u00ED reflektometrie, kdy ze serie fotek vzorku osv\u011Btlen\u00E9ho sv\u011Btlem o r\u016Fzn\u00FDch vlnov\u00FDch d\u00E9lk\u00E1ch, lze sestavit sadu reflektometrick\u00FDch spekter, ze kter\u00E9 se pak ur\u010D\u00ED optick\u00E9 vlastnosti vzorku jako nap\u0159. index lomu, index absorpce \u010Di tlou\u0161\u0165ky tenk\u00E9 vrstvy na velk\u00E9 plo\u0161e vzorku (cca 1 cm2)." . . "Metrologie p\u0159i v\u00FDrob\u011B tenk\u00FDch vrstev" . "1"^^ . . . "0"^^ . "Metrology for the manufacturing of thin films"@en . "http://www.isvav.cz/projectDetail.do?rowId=7AX12102"^^ . . . "0"^^ . . "Within this project questions related to the characterization of thin films will be addressed. Particular tasks are as follows: - traceability, intercomparison and validation of methods used for determination of material properties relevant for thin film systems, - development and evaluation of measurement methods for difficult layered systems, - metrology applicable on the manufacturing quality control. Within the project, CMI will deal with reflectance measurement on large areas of a sample. It is a method known as digital reflectometry with the help of which it is possible to calculate a set of reflectometric spectra from a series of images acquired under illumination with light of different wavelengths. From the reflectometric spectra it is then possible to calculate the optical properties of the sample such as index of refraction, extinction coefficient or thickness of the thin film on large sample area (ca 1 cm2)."@en . "0"^^ . . " traceability" .