"1175"^^ . "1"^^ . . . . . . "The submitted project is concentrated on the systematic study of influence of combination of pulsed laser deposition (PLD) and radiofrequency (RF) discharges on the quality of thin optical layers. PLD and RF plasma (with capacitive and inductivecoupling), various electrodes configuration (planar, hollow cathode), and with changing gas and pressure compositions will be analyzed. Optical emission and absorption spectroscopy, CCD camera and Langmuir probes will be applied. Goal is to determine therelation among PLD parameters, RF additional discharges and the properties of created thin optical layers. Attention will be paid to waveguiding layers like Ti :sapphire, YAG, YAP with various Nd, Er, Yb doping, to the ferroelectric PLZT and PZT layerswith various buffer layers (created on amorphous substrates), and to the diamond- like films prepared by PLD and additional discharges (RF and hollow cathode). Influence of PLD deposition parameters and RF discharges on the crystallinity, density,"@en . "4"^^ . . "0"^^ . "4"^^ . . "P\u0159edkl\u00E1dan\u00FD projekt si klade za c\u00EDl systematick\u00E9 studium vlivu kombinace laserov\u00E9 pulsn\u00ED depozice (PLD) a r.f. v\u00FDboj\u016F na kvalitu tenk\u00FDch optick\u00FDch vrstev. Bude analyzov\u00E1no plazma PLD a vysokofrekven\u010Dn\u00EDho r.f. v\u00FDboje (s r\u016Fznou vazbou - kapacitn\u00ED ainduktivn\u00ED), konfigurac\u00ED elektrod (plan\u00E1rn\u00ED elektrody, dut\u00E1 katoda) a s r\u016Fzn\u00FDm slo\u017Een\u00ED pracovn\u00EDch plyn\u016F a tlak\u016F. Bude aplikov\u00E1na emisn\u00ED a absorp\u010Dn\u00ED optick\u00E9 spektroskopie, CCD kamera a Langmuirovsk\u00E9 sondy. Jedn\u00EDm z c\u00EDl\u016F je ur\u010Den\u00ED vztahu mezi parametryPLD, r.f. p\u0159\u00EDdavn\u00FDch v\u00FDboj\u016F a vlastnostmi p\u0159ipraven\u00FDch optick\u00FDch vrstev. Pozornost bude zam\u011B\u0159ena zejm\u00E9na na vlnovodov\u00E9 vrstvy Ti:saf\u00EDru, YAG-u, YAP-u s r\u016Fznou dopac\u00ED Nd a Er:Yb, na feroelektrick\u00E9 vrstvy PLZT a PZT s r\u016Fzn\u00FDmi mezivrstvami deponovan\u00FDmi naamorfn\u00EDch substr\u00E1tech a v neposledn\u00ED \u0159ad\u011B na diamantu podobn\u00E9 vrstvy deponovan\u00E9 s p\u0159\u00EDdavn\u00FDmi v\u00FDboji (r.f. a dut\u00E1 katoda). Pozornost bude v\u011Bnov\u00E1na vlivu parametr\u016F PLD a r.f. v\u00FDboj\u016F na zlep\u0161en\u00ED krystalinity, hustoty, adheze a morfologie p\u0159ipravovan\u00FDch"@cs . "612"^^ . . "Vliv kombinace pulsn\u00ED laserov\u00E9 depozice a r.f. v\u00FDboj\u016F na vlastnosti optick\u00FDch vrstev"@cs . "0"^^ . "Study of combined PLD with r.f. discharges for improvement of optic layers properties"@en . . . . "Neuvedeno."@en .