. . . . "0"^^ . "The project proposal is aimed at a design and construction of the compact equipment for in-situ measurement of thin film surface homogeneity. This equipment consists of a stable source of white light, CCD camera and dual spectrophotometer. The function of the instrument (based on an original method of the detection of the white light scattered from the growing thin film in a CCD camera) will be verified via its installation onto a vacuum deposition chamber containing two Kaufman's broad ion beam source- (IBAD). The results will be utilized in the deposition process control and thus we should be able to prepare the multilayer structures with a defined optical properties. The advantage of the apparatus is its wide applicability for in-situ control of thin films deposited by other technologies. In the project students of the Master and PhD degree cource will be involved."@en . . "N\u00E1vrh a konstrukce za\u0159\u00EDzen\u00ED pro in-situ m\u011B\u0159en\u00ED plo\u0161n\u00E9 homogenity tenk\u00FDch vrstev"@cs . "0"^^ . "Projekt si klade za c\u00EDl navrhnout a zkonstruovat kompaktn\u00ED m\u011B\u0159\u00EDc\u00ED optick\u00E9 za\u0159\u00EDzen\u00ED k plo\u0161n\u00E9mu in-situ m\u011B\u0159en\u00ED tlou\u0161t\u011Bk a optick\u00FDch konstant tenk\u00FDch vrstev. Funkce tohoto m\u011B\u0159\u00EDc\u00EDho p\u0159\u00EDstroje, jen\u017E je zalo\u017Een na origin\u00E1ln\u00ED metod\u011B detekce odra\u017Een\u00E9ho b\u00EDl\u00E9ho sv\u011Btla CCD kamerou, bude optimalizov\u00E1na ve spojen\u00ED se st\u00E1vaj\u00EDc\u00ED vakuovou depozi\u010Dn\u00ED aparaturou, vyu\u017E\u00EDvaj\u00EDc\u00ED k depozici tenk\u00FDch vrstev dva \u0161irokosvazkov\u00E9 iontov\u00E9 zdroje Kaufmanova typu. Z\u00EDskan\u00E9 poznatky budou n\u00E1sledn\u011B vyu\u017Eity k \u0159\u00EDzen\u00ED depozi\u010Dn\u00EDho procesu aumo\u017En\u00ED tak uskute\u010Dn\u011Bn\u00ED c\u00EDlen\u00FDch technologick\u00FDch z\u00E1sah\u016F v pr\u016Fb\u011Bhu r\u016Fstu vrstevnat\u00E9ho syst\u00E9mu. Nespornou p\u0159ednost\u00ED navrhovan\u00E9ho za\u0159\u00EDzen\u00ED je jeho univerz\u00E1lnost - principi\u00E1ln\u011B jej bude mo\u017Eno vyu\u017E\u00EDt k in-situ anal\u00FDz\u00E1m deponovan\u00FDch tenk\u00FDch vrstev vytvo\u0159en\u00FDch ijin\u00FDmi v\u00FD\u0161e zm\u00EDn\u011Bn\u00FDmi iontov\u011B-svazkov\u00FDmi technologiemi. \u010C\u00E1st n\u00E1vrh\u016F jednotliv\u00FDch komponent bude zaji\u0161t\u011Bna diplomov\u00FDmi projekty student\u016F oboru fyzik\u00E1ln\u00EDho in\u017Een\u00FDrstv\u00ED \u00DAFI FS Brno a n\u00E1pln\u00ED navazuj\u00EDc\u00EDho doktorandsk\u00E9ho studia Realizace navrhovan\u00E9ho m\u011B\u0159\u00EDc\u00EDho"@cs . "Design and construction of the equipment for in-situ measurement of thin film surface homogeneity"@en . . . "1068"^^ . "1"^^ . . "1068"^^ . . . "17"^^ . . . "17"^^ .