"C\u00EDlem navrhovan\u00E9ho projektu bude studium n\u00EDzkotlak\u00E9ho plazmatick\u00E9ho v\u00EDcetryskov\u00E9ho napra\u0161ovac\u00EDho syst\u00E9mu, kter\u00FD bude pou\u017Eit pro n\u00EDzkoteplotn\u00ED depozici tenk\u00FDch vrstev perovskit\u016F (PZT(Pb1-xZrxTiO3),SrMoFeO6,KNbO3 a KTaO3. Hlavn\u00ED c\u00EDl bude depozice t\u011Bchto typ\u016F vrstev a polymern\u00ED a plastov\u00E9 substr\u00E1ty. Na deponovan\u00FDch vrstv\u00E1ch budou zkoum\u00E1ny feroelektrick\u00E9 vlastnosti, struktura, chemick\u00E9 slo\u017Een\u00ED, hustota defekt\u016F, optick\u00E9 vlastnosti atd. Tyto parametry budou korelov\u00E1ny s r\u016Fzn\u00FDmi konfiguracemi v\u00EDcetryskov\u00E9ho syst\u00E9mu a parametry reaktivn\u00EDho plazmatu. Reaktivn\u00ED rozpra\u0161ov\u00E1n\u00ED trysek pracuj\u00EDc\u00EDch jako dut\u00E9 katody bude vyu\u017Eito pro depozi\u010Dn\u00ED proces. V\u00FDboj v dut\u00FDch katod\u00E1ch bude generov\u00E1n pomoc\u00ED vysokofrekven\u010Dn\u00EDho vykonov\u00E9ho zdroje. V p\u0159\u00EDpad\u011B vodiv\u00FDch dut\u00FDch katod bude studov\u00E1no nav\u00EDc stejnosm\u011Brn\u00E9 buzen\u00ED v\u00FDboje v dut\u00E9 katod\u011B. Pro diagnostiku plazmatu, kter\u00E1 bude prov\u00E1d\u011Bna p\u0159\u00EDmo p\u0159i depozi\u010Dn\u00EDm procesu bude pou\u017Eita \u010Dasov\u011B rozli\u0161en\u00E1 emisn\u00ED spektroskopie a rychl\u00E1 RF kompenzovan\u00E1 Langmuirova sonda."@cs . "1316"^^ . "Studium v\u00EDcetryskov\u00E9ho syst\u00E9mu s plazmov\u00FDmi kan\u00E1ly a dut\u00FDmi katodami pro n\u00EDzkoteplotn\u00ED depozici perovskitov\u00FDch tenk\u00FDch vrstev"@cs . . . . . . "1316"^^ . "hollow cathode; plasma jet; ferroelectric thin films; reactive sputtering; Langmuir probe; emission spectroscopy"@en . . "6"^^ . . "0"^^ . . "0"^^ . "6"^^ . . . . "1"^^ . "The aim of the project will be investigation of the low pressure multi- plasma jet sputtering system used for the temperature deposition of thin film perovskites structures as PZT (Pb1-xZrxTiO3), Sr2 MoFeO6, KNbO3 and KTaO3. The main target will be to obtain those films on polymer and plastic substrates. Properties of deposited films as ferroelectric behavior, structure, chemical composition, density of defects, optical properties etc. will be studied and correlated with the configuration of the multi-plasma jet system and properties of reactive plasma. Reactive sputtering of the nozzles working as hollow cathodes will be used for the deposition process. Radio-frequency excitation of high density hollow cathode jets will be used. Furthermore direct current plasma excitation in the case of conductive nozzles will be studied as well. In situ time resolved emission spectroscopy and fast RF compensated Langmuir probe system will be used for study of plasma parameters."@en . "Investigation of Multi-Plasma-Jet System as a Source for Low Temperature Deposition of Perovskites Thin Films"@en .