. "scanning transmitted electron microscopy; very slow electrons; scanning electron microscopy; low energy electrons"@en . . . . . "2011-12-31+01:00"^^ . "Scanning transmission electron microscope, usually operating at primary beam energies above tens of keV, is widely used for studiing of thin samples. Mean free paths of elastic (EMFP) and inelastic (IMFP) scattering of electrons increase as the primary beam energy is increased, therefore penetration of electrons through a sample of a given thickness is question of using suitably high primary energy, which leads to radiation damage. If the primary energy is lowered below 100 eV, however, IMFP grows again but the same does not hold for EMFP. The aim of this project is to study possibilities of the scanning transmission electron microscopy with very low energy, where the cathode lens decelerates the electron beam just in front of the specimen surface, securing resolution of a few nm even at the landing energy below a few eV. Influence of the thin film sample on transmission of the primary beam and spectroscopy of transmitted electrons will be examined."@en . "Scanning transmission electron microscopy with very slow electrons"@en . "18"^^ . "2009-01-01+01:00"^^ . "0"^^ . . . "Rastrovac\u00ED proza\u0159ovac\u00ED elektronov\u00E1 mikroskopie s velmi pomal\u00FDmi elektrony"@cs . . . "2467"^^ . . "18"^^ . . "Rastrovac\u00ED proza\u0159ovac\u00ED elektronov\u00FD mikroskop, pracuj\u00EDc\u00ED obvykle s energi\u00ED prim\u00E1rn\u00EDho svazku elektron\u016F nad des\u00EDtkami keV, je \u0161iroce u\u017E\u00EDvan\u00E9 za\u0159\u00EDzen\u00ED pro studium tenk\u00FDch vzork\u016F. St\u0159edn\u00ED voln\u00E9 dr\u00E1hy pru\u017En\u00E9ho (EMFP) a nepru\u017En\u00E9ho (EMFP) rozptylu elektron\u016F rostou se vzr\u016Fstaj\u00EDc\u00ED energi\u00ED. Pr\u016Fchod elektron\u016F vzorkem ur\u010Dit\u00E9 tlou\u0161\u0165ky je tak ot\u00E1zkou pou\u017Eit\u00ED dostate\u010Dn\u011B vysok\u00E9 energie prim\u00E1rn\u00EDch elektron\u016F, co\u017E m\u016F\u017Ee v\u00E9st k radia\u010Dn\u00EDmu po\u0161kozen\u00ED vzorku. Je-li energie prim\u00E1rn\u00EDch elektron\u016F sni\u017Eov\u00E1na pod 100 eV, IMFP za\u010D\u00EDn\u00E1 op\u011Bt nar\u016Fstat, av\u0161ak tot\u00E9\u017E neplat\u00ED pro EMFP. C\u00EDlem tohoto projektu je studium mo\u017Enost\u00ED rastrovac\u00ED proza\u0159ovac\u00ED elektronov\u00E9 mikroskopie s velmi n\u00EDzkou energi\u00ED, kde k br\u017Ed\u011Bn\u00ED elektronov\u00E9ho svazku t\u011Bsn\u011B nad vzorkem je pou\u017Eita katodov\u00E1 \u010Do\u010Dka. Je tak mo\u017En\u00E9 dos\u00E1hnout rozli\u0161en\u00ED n\u011Bkolika nm i p\u0159i energii n\u011Bkolika eV. Studov\u00E1n bude hlavn\u011B vliv vzorku na pr\u016Fchod prim\u00E1rn\u00EDho svazku elektron\u016F a \u00FAhlov\u011B-energiov\u00E1 spektroskopie pro\u0161l\u00FDch elektron\u016F."@cs . "2467"^^ . "1"^^ . . "0"^^ .