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Statements

Subject Item
n2:RIV%2F70883521%3A28140%2F14%3A43871464%21RIV15-MSM-28140___
rdf:type
n19:Vysledek skos:Concept
dcterms:description
This paper deals with measuring principles of scanning probe microscopy (force microscopy and microwave microscopy) which is applied to diagnostician of ultra-thin tungsten films on silicon substrate. Tungsten was sputtered on silicon wafer with radio frequency magnetron sputtering method. Some topographical and electromagnetic properties were measured and visualized. This paper deals with measuring principles of scanning probe microscopy (force microscopy and microwave microscopy) which is applied to diagnostician of ultra-thin tungsten films on silicon substrate. Tungsten was sputtered on silicon wafer with radio frequency magnetron sputtering method. Some topographical and electromagnetic properties were measured and visualized.
dcterms:title
Scanning probe microscopy method for diagnostics of ultra-thin tungsten films on silicon substrate Scanning probe microscopy method for diagnostics of ultra-thin tungsten films on silicon substrate
skos:prefLabel
Scanning probe microscopy method for diagnostics of ultra-thin tungsten films on silicon substrate Scanning probe microscopy method for diagnostics of ultra-thin tungsten films on silicon substrate
skos:notation
RIV/70883521:28140/14:43871464!RIV15-MSM-28140___
n4:aktivita
n16:P
n4:aktivity
P(ED2.1.00/03.0089)
n4:dodaniDat
n21:2015
n4:domaciTvurceVysledku
n10:1364065 n10:1318896 n10:9605363 n10:2065614 n10:5931177
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n12:D
n4:duvernostUdaju
n18:S
n4:entitaPredkladatele
n8:predkladatel
n4:idSjednocenehoVysledku
43861
n4:idVysledku
RIV/70883521:28140/14:43871464
n4:jazykVysledku
n11:eng
n4:klicovaSlova
atomic force microscopy, scanning microwave microscopy, tungsten on silicon substrate, ultra-thin film.
n4:klicoveSlovo
n5:ultra-thin%20film. n5:scanning%20microwave%20microscopy n5:tungsten%20on%20silicon%20substrate n5:atomic%20force%20microscopy
n4:kontrolniKodProRIV
[80BBECDB0755]
n4:mistoKonaniAkce
Santorini Island
n4:mistoVydani
Rhodes
n4:nazevZdroje
Latest Trends on Systems. Volume I
n4:obor
n13:JB
n4:pocetDomacichTvurcuVysledku
5
n4:pocetTvurcuVysledku
6
n4:projekt
n20:ED2.1.00%2F03.0089
n4:rokUplatneniVysledku
n21:2014
n4:tvurceVysledku
Svoboda, Jaroslav Hruška, František Martínek, Tomáš Křesálek, Vojtěch Navrátil, Milan Kudělka, Josef
n4:typAkce
n9:WRD
n4:zahajeniAkce
2014-07-17+02:00
s:issn
1790-5117
s:numberOfPages
6
n3:hasPublisher
Europment
n17:isbn
978-1-61804-243-9
n15:organizacniJednotka
28140