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Statements

Subject Item
n2:RIV%2F68407700%3A21460%2F11%3A00185457%21RIV15-MSM-21460___
rdf:type
skos:Concept n15:Vysledek
dcterms:description
In this work, we focused on the usability of scratch test technique for determination of thin films adhesion with the layer thicknesses around one hundred nanometres and less. For this study we prepared titanium dioxide and diamond-like-carbon thin films deposited by Pulsed Laser Deposition technique. We tested microhardness and friction behaviour on the same samples. We tested adhesion properties by micro and macro scratch tests techniques on three different measurement instruments. We used macroscratch tester Revetest (CSM corp.), nanosclerometric extending atomic force microscope (AFM) head Solver Next (NT-MTD corp.), and Hysitron TI950 with nanoscratch transducer. We observed and compared abilities for the each individual instrument to evaluate adhesion of thin films with thickness of several tenths of nanometres. We were looking for advantages and disadvantages of these systems and methods. In this work, we focused on the usability of scratch test technique for determination of thin films adhesion with the layer thicknesses around one hundred nanometres and less. For this study we prepared titanium dioxide and diamond-like-carbon thin films deposited by Pulsed Laser Deposition technique. We tested microhardness and friction behaviour on the same samples. We tested adhesion properties by micro and macro scratch tests techniques on three different measurement instruments. We used macroscratch tester Revetest (CSM corp.), nanosclerometric extending atomic force microscope (AFM) head Solver Next (NT-MTD corp.), and Hysitron TI950 with nanoscratch transducer. We observed and compared abilities for the each individual instrument to evaluate adhesion of thin films with thickness of several tenths of nanometres. We were looking for advantages and disadvantages of these systems and methods.
dcterms:title
Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films
skos:prefLabel
Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films
skos:notation
RIV/68407700:21460/11:00185457!RIV15-MSM-21460___
n3:aktivita
n16:S
n3:aktivity
S
n3:dodaniDat
n7:2015
n3:domaciTvurceVysledku
n9:4619048 n9:5035139 n9:3896919 n9:7895712 n9:1722247
n3:druhVysledku
n13:O
n3:duvernostUdaju
n11:S
n3:entitaPredkladatele
n12:predkladatel
n3:idSjednocenehoVysledku
191182
n3:idVysledku
RIV/68407700:21460/11:00185457
n3:jazykVysledku
n8:eng
n3:klicovaSlova
thin films; adhesion; scratch test; nanoindentation; standards; standardization; diamond-like-carbon (DLC); titanium dioxide (TiO2)
n3:klicoveSlovo
n5:standardization n5:standards n5:nanoindentation n5:titanium%20dioxide%20%28TiO2%29 n5:scratch%20test n5:thin%20films n5:diamond-like-carbon%20%28DLC%29 n5:adhesion
n3:kontrolniKodProRIV
[48AD9A9C95C7]
n3:obor
n10:BM
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
7
n3:rokUplatneniVysledku
n7:2011
n3:tvurceVysledku
Lukeš, Jaroslav Mikšovský, Jan Tolde, Zdeněk Kocourek, Tomáš Remsa, Jan Jelínek, Miroslav Kutílek, Patrik
n14:organizacniJednotka
21460