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Statements

Subject Item
n2:RIV%2F68407700%3A21460%2F06%3A12117676%21RIV08-MSM-21460___
rdf:type
n5:Vysledek skos:Concept
dcterms:description
TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10% CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to excite and ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated. TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10% CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to excite and ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated. Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace.
dcterms:title
Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace.
skos:prefLabel
Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace.
skos:notation
RIV/68407700:21460/06:12117676!RIV08-MSM-21460___
n3:strany
503;507
n3:aktivita
n7:Z
n3:aktivity
Z(MSM6840770012)
n3:cisloPeriodika
3
n3:dodaniDat
n14:2008
n3:domaciTvurceVysledku
n6:7895712
n3:druhVysledku
n18:J
n3:duvernostUdaju
n4:S
n3:entitaPredkladatele
n8:predkladatel
n3:idSjednocenehoVysledku
478463
n3:idVysledku
RIV/68407700:21460/06:12117676
n3:jazykVysledku
n13:eng
n3:klicovaSlova
Nanocomposite Films; inductively coupled plasma
n3:klicoveSlovo
n12:inductively%20coupled%20plasma n12:Nanocomposite%20Films
n3:kodStatuVydavatele
DE - Spolková republika Německo
n3:kontrolniKodProRIV
[783BA31150D7]
n3:nazevZdroje
Applied Physics A: Materials Science and Processing
n3:obor
n10:BH
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
9
n3:rokUplatneniVysledku
n14:2006
n3:svazekPeriodika
82
n3:tvurceVysledku
Colpo, P. Ceccone, G. Levashov, E. A. Rossi, F. Jelínek, Miroslav Gipson, P. N. Shtansky, D. V. Philip, P. J. M. Kulisch, W.
n3:zamer
n15:MSM6840770012
s:issn
0947-8396
s:numberOfPages
5
n16:organizacniJednotka
21460