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Statements

Subject Item
n2:RIV%2F68407700%3A21340%2F12%3A00204152%21RIV13-MSM-21340___
rdf:type
n10:Vysledek skos:Concept
rdfs:seeAlso
http://proceedings.aip.org/resource/2/apcpcs/1437/1/126_1?isAuthorized=no
dcterms:description
In this work we present a short review of SXR and EUV optics that have been designed and developed for experiments concerning material processing and imaging, using a laser-plasma radiation source based on a gas puff target. Three different kinds of mirrors employed as the EUV collectors are presented: the grazing incidence axisymmetrical ellipsoidal mirror, the grazing incidence multifoil mirror, and the ellipsoidal mirror with Mo/Si multilayer coating. Experiments concerning characterization of the mirrors were performed using EUV radiation from Kr or Xe plasmas produced in a double stream gas puff target irradiated with Nd:YAG laser pulses (4ns, 0.8 J, 10 Hz). Intensity of the focused radiation was sufficient for micromachining of organic polymers and surface modification of organic and inorganic solids. Different kinds of micro-and nanostructures created in near-surface layers of different kinds polymers were obtained. Significant differences were revealed in XPS spectra acquired for irradiated and not irradiated polymers. 2012 American Institute of Physics. In this work we present a short review of SXR and EUV optics that have been designed and developed for experiments concerning material processing and imaging, using a laser-plasma radiation source based on a gas puff target. Three different kinds of mirrors employed as the EUV collectors are presented: the grazing incidence axisymmetrical ellipsoidal mirror, the grazing incidence multifoil mirror, and the ellipsoidal mirror with Mo/Si multilayer coating. Experiments concerning characterization of the mirrors were performed using EUV radiation from Kr or Xe plasmas produced in a double stream gas puff target irradiated with Nd:YAG laser pulses (4ns, 0.8 J, 10 Hz). Intensity of the focused radiation was sufficient for micromachining of organic polymers and surface modification of organic and inorganic solids. Different kinds of micro-and nanostructures created in near-surface layers of different kinds polymers were obtained. Significant differences were revealed in XPS spectra acquired for irradiated and not irradiated polymers. 2012 American Institute of Physics.
dcterms:title
X-ray optics for laser-plasma sources: Aplications of intense SXR and EUV radiation pulses X-ray optics for laser-plasma sources: Aplications of intense SXR and EUV radiation pulses
skos:prefLabel
X-ray optics for laser-plasma sources: Aplications of intense SXR and EUV radiation pulses X-ray optics for laser-plasma sources: Aplications of intense SXR and EUV radiation pulses
skos:notation
RIV/68407700:21340/12:00204152!RIV13-MSM-21340___
n10:predkladatel
n11:orjk%3A21340
n4:aktivita
n17:P
n4:aktivity
P(LA08024)
n4:dodaniDat
n16:2013
n4:domaciTvurceVysledku
n12:6576540
n4:druhVysledku
n6:D
n4:duvernostUdaju
n20:S
n4:entitaPredkladatele
n5:predkladatel
n4:idSjednocenehoVysledku
181185
n4:idVysledku
RIV/68407700:21340/12:00204152
n4:jazykVysledku
n9:eng
n4:klicovaSlova
ablation; extreme ultraviolet; gas-puff target; laser-plasma; surface modification
n4:klicoveSlovo
n8:ablation n8:gas-puff%20target n8:extreme%20ultraviolet n8:surface%20modification n8:laser-plasma
n4:kontrolniKodProRIV
[9645824EB4CC]
n4:mistoKonaniAkce
Campinas
n4:mistoVydani
Austin
n4:nazevZdroje
AIP Conference Proceedings
n4:obor
n21:BL
n4:pocetDomacichTvurcuVysledku
1
n4:pocetTvurcuVysledku
8
n4:projekt
n24:LA08024
n4:rokUplatneniVysledku
n16:2012
n4:tvurceVysledku
Szczurek, M. Jarocki, R. Pína, Ladislav Wachulak, P. Fiedorowicz, H. Kostecki, J. Szczurek, A. Bartnik, A.
n4:typAkce
n7:WRD
n4:zahajeniAkce
2011-09-05+02:00
s:issn
0094-243X
s:numberOfPages
6
n23:doi
10.1063/1.3703356
n19:hasPublisher
American Institute of Physic
n13:isbn
978-0-7354-1027-5
n22:organizacniJednotka
21340