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Statements

Subject Item
n2:RIV%2F68407700%3A21340%2F03%3A04092443%21RIV%2F2004%2FMSM%2F213404%2FN
rdf:type
n10:Vysledek skos:Concept
dcterms:description
Raman scattering, X-ray photoemission spectroscopy (XPS), Fourier transform photocurrent spectroscopy (FTPS), Rutherford backscattering (RBS) and electron paramagnetic resonance (EPR) method have been used for characterization of diamond layers deposited by microwave plasma enhanced chemical vapor deposition (MWPECVD). As substrates, thick silicon wafers pretreated by the mechanical seeding have been used, surrounded by the molybdenum ring. Here we report how this configuration can lead to the Mo contamination of diamond layers (similar effect to the well known contamination of diamond by Si) and we study the optical spectra related to the presence of molybdenum and other impurities over the bulk of deposited layers. Mo contamination was confirmed by XPS measurements, but we were not able to detect it by RBS and EPR Raman scattering, X-ray photoemission spectroscopy (XPS), Fourier transform photocurrent spectroscopy (FTPS), Rutherford backscattering (RBS) and electron paramagnetic resonance (EPR) method have been used for characterization of diamond layers deposited by microwave plasma enhanced chemical vapor deposition (MWPECVD). As substrates, thick silicon wafers pretreated by the mechanical seeding have been used, surrounded by the molybdenum ring. Here we report how this configuration can lead to the Mo contamination of diamond layers (similar effect to the well known contamination of diamond by Si) and we study the optical spectra related to the presence of molybdenum and other impurities over the bulk of deposited layers. Mo contamination was confirmed by XPS measurements, but we were not able to detect it by RBS and EPR
dcterms:title
Detection of residual molybdenum impurity in CVD diamond Detection of residual molybdenum impurity in CVD diamond
skos:prefLabel
Detection of residual molybdenum impurity in CVD diamond Detection of residual molybdenum impurity in CVD diamond
skos:notation
RIV/68407700:21340/03:04092443!RIV/2004/MSM/213404/N
n4:strany
108 ; 112
n4:aktivita
n12:Z n12:P
n4:aktivity
P(GA202/02/0218), P(KSK1010104), Z(AV0Z1010914), Z(AV0Z1048901), Z(MSM 210000021)
n4:cisloPeriodika
1
n4:dodaniDat
n15:2004
n4:domaciTvurceVysledku
n17:9333002
n4:druhVysledku
n7:J
n4:duvernostUdaju
n11:S
n4:entitaPredkladatele
n19:predkladatel
n4:idSjednocenehoVysledku
603289
n4:idVysledku
RIV/68407700:21340/03:04092443
n4:jazykVysledku
n16:eng
n4:klicovaSlova
CVD,Diamond,Raman Scattering,XPS
n4:klicoveSlovo
n8:Raman%20Scattering n8:Diamond n8:CVD n8:XPS
n4:kodStatuVydavatele
DE - Spolková republika Německo
n4:kontrolniKodProRIV
[FFB7C8EF8C39]
n4:nazevZdroje
Physica Status Solidi
n4:obor
n14:BM
n4:pocetDomacichTvurcuVysledku
1
n4:pocetTvurcuVysledku
7
n4:projekt
n9:GA202%2F02%2F0218 n9:KSK1010104
n4:rokUplatneniVysledku
n15:2003
n4:svazekPeriodika
199
n4:tvurceVysledku
Kromka, A. Poruba, A. Zemek, J. Rosa, J. Peřina, V. Vaněček, M. Kravets, Roman
n4:zamer
n5:MSM%20210000021 n5:AV0Z1048901 n5:AV0Z1010914
s:issn
0031-8965
s:numberOfPages
5
n18:organizacniJednotka
21340