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Statements

Subject Item
n2:RIV%2F68407700%3A21230%2F10%3A00174271%21RIV11-GA0-21230___
rdf:type
skos:Concept n22:Vysledek
dcterms:description
There is described a MOS structure in the use of flow sensor system in the paper. MOS structure as a temperature sensor allows measurement of temperature gradient. One allows computation of direction of air flow over the structure chip. Four MOS structure of temperature sensors has been used for the design of sensitivity flow sensor. Different arrangements of MOS structure have been designed. Software standard tools have been used for simulation and modeling of structure properties. Maximum values of structure sensitivity in dependence on operating temperature have been computed. The parameters have been used for the design. Suitable structure temperature was found during simulations. Circuit connection of sensor temperature matrix was designed. New results of sensitivity and resolution of MOS sensor systems were obtained. The working efforts were focused on the sensitivity, angle resolution and small power consumption. There is described a MOS structure in the use of flow sensor system in the paper. MOS structure as a temperature sensor allows measurement of temperature gradient. One allows computation of direction of air flow over the structure chip. Four MOS structure of temperature sensors has been used for the design of sensitivity flow sensor. Different arrangements of MOS structure have been designed. Software standard tools have been used for simulation and modeling of structure properties. Maximum values of structure sensitivity in dependence on operating temperature have been computed. The parameters have been used for the design. Suitable structure temperature was found during simulations. Circuit connection of sensor temperature matrix was designed. New results of sensitivity and resolution of MOS sensor systems were obtained. The working efforts were focused on the sensitivity, angle resolution and small power consumption.
dcterms:title
One-chip MOS Structure for Temperature Flow Sensor One-chip MOS Structure for Temperature Flow Sensor
skos:prefLabel
One-chip MOS Structure for Temperature Flow Sensor One-chip MOS Structure for Temperature Flow Sensor
skos:notation
RIV/68407700:21230/10:00174271!RIV11-GA0-21230___
n3:aktivita
n8:P n8:Z
n3:aktivity
P(GA102/09/1601), Z(MSM6840770015)
n3:dodaniDat
n17:2011
n3:domaciTvurceVysledku
n15:8532214 n15:8536112 n15:7043104
n3:druhVysledku
n13:D
n3:duvernostUdaju
n20:S
n3:entitaPredkladatele
n16:predkladatel
n3:idSjednocenehoVysledku
276973
n3:idVysledku
RIV/68407700:21230/10:00174271
n3:jazykVysledku
n12:eng
n3:klicovaSlova
MOS, structure, flow, direction, sensors, sensitivity, design
n3:klicoveSlovo
n4:sensors n4:flow n4:MOS n4:direction n4:structure n4:sensitivity n4:design
n3:kontrolniKodProRIV
[9190B12AF676]
n3:mistoKonaniAkce
Anaheim
n3:mistoVydani
Boston
n3:nazevZdroje
2010 Proceeding Nanotech, Clean Technology, Microtech, Bio nanotech
n3:obor
n11:JB
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
3
n3:projekt
n10:GA102%2F09%2F1601
n3:rokUplatneniVysledku
n17:2010
n3:tvurceVysledku
Husák, Miroslav Bouřa, Adam Jakovenko, Jiří
n3:typAkce
n18:WRD
n3:zahajeniAkce
2010-06-21+02:00
n3:zamer
n21:MSM6840770015
s:numberOfPages
3
n19:hasPublisher
Nano Science and Technology Institute
n5:isbn
978-1-4398-3421-3
n6:organizacniJednotka
21230