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Statements

Subject Item
n2:RIV%2F68407700%3A21230%2F09%3A00155778%21RIV10-MSM-21230___
rdf:type
skos:Concept n8:Vysledek
dcterms:description
The paper deals with synthesis of novel defects in silicon by ion irradiation for future application in semiconductor technology: low-temperature formation of deep donor layers. The paper deals with synthesis of novel defects in silicon by ion irradiation for future application in semiconductor technology: low-temperature formation of deep donor layers.
dcterms:title
Synthesis of novel defects in silicon by ion irradiation for future application in semiconductor technology: low-temperature formation of deep donor layers Synthesis of novel defects in silicon by ion irradiation for future application in semiconductor technology: low-temperature formation of deep donor layers
skos:prefLabel
Synthesis of novel defects in silicon by ion irradiation for future application in semiconductor technology: low-temperature formation of deep donor layers Synthesis of novel defects in silicon by ion irradiation for future application in semiconductor technology: low-temperature formation of deep donor layers
skos:notation
RIV/68407700:21230/09:00155778!RIV10-MSM-21230___
n3:aktivita
n7:P
n3:aktivity
P(GP102/08/P488), P(LC06041)
n3:dodaniDat
n18:2010
n3:domaciTvurceVysledku
n20:5896029 n20:6368484
n3:druhVysledku
n11:D
n3:duvernostUdaju
n19:S
n3:entitaPredkladatele
n21:predkladatel
n3:idSjednocenehoVysledku
345113
n3:idVysledku
RIV/68407700:21230/09:00155778
n3:jazykVysledku
n13:eng
n3:klicovaSlova
ion irradiation; silicon
n3:klicoveSlovo
n14:silicon n14:ion%20irradiation
n3:kontrolniKodProRIV
[2B70A7AC40A0]
n3:mistoKonaniAkce
Praha
n3:mistoVydani
Praha
n3:nazevZdroje
Workshop 09
n3:obor
n15:JA
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
2
n3:projekt
n9:GP102%2F08%2FP488 n9:LC06041
n3:rokUplatneniVysledku
n18:2009
n3:tvurceVysledku
Hazdra, Pavel Komarnitskyy, Volodymyr
n3:typAkce
n10:EUR
n3:zahajeniAkce
2009-02-16+01:00
s:numberOfPages
2
n12:hasPublisher
České vysoké učení technické v Praze
n17:isbn
978-80-01-04286-1
n4:organizacniJednotka
21230