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Statements

Subject Item
n2:RIV%2F68407700%3A21230%2F07%3A03137126%21RIV08-MSM-21230___
rdf:type
n15:Vysledek skos:Concept
dcterms:description
This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC. This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC. This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC.
dcterms:title
Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors
skos:prefLabel
Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors
skos:notation
RIV/68407700:21230/07:03137126!RIV08-MSM-21230___
n3:strany
147;150
n3:aktivita
n20:Z
n3:aktivity
Z(MSM6840770012)
n3:dodaniDat
n17:2008
n3:domaciTvurceVysledku
n4:8536112 n4:7043104
n3:druhVysledku
n12:D
n3:duvernostUdaju
n18:S
n3:entitaPredkladatele
n7:predkladatel
n3:idSjednocenehoVysledku
416372
n3:idVysledku
RIV/68407700:21230/07:03137126
n3:jazykVysledku
n5:eng
n3:klicovaSlova
MEMS, Gas Sensor
n3:klicoveSlovo
n8:MEMS n8:Gas%20Sensor
n3:kontrolniKodProRIV
[997C714DD87A]
n3:mistoKonaniAkce
Stresa
n3:mistoVydani
Grenoble
n3:nazevZdroje
DTIP 2007
n3:obor
n19:JA
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
5
n3:rokUplatneniVysledku
n17:2007
n3:tvurceVysledku
Jakovenko, Jiří Husák, Miroslav Drzik, M. D. Vanko, G. V. Lainsky, T. L.
n3:typAkce
n10:WRD
n3:zahajeniAkce
2007-04-25+02:00
n3:zamer
n14:MSM6840770012
s:numberOfPages
4
n16:hasPublisher
TIMA
n21:isbn
978-2-35500-000-3
n11:organizacniJednotka
21230